TCCT MATCH CIRCUIT FOR PLASMA ETCH CHAMBERS

• US 20130135058A1
• Filed: 01/25/2013
• Published: 05/30/2013
• Est. Priority Date: 04/28/2011
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Long, Maolin, Marsh, Ricky, Paterson, Alex
• Granted Patent: US 9,059,678 B2
• Time in Patent Office: Days
• US Class Current: 333/32
• CPC Class Codes: H03H 7/38 Impedance-matching networks
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance

Abstract

A match circuit includes the following: a power input circuit coupled to an RF source; an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit; an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection to ground; an outer coil input circuit coupled between the first node and an input terminal of an outer coil; and an outer coil output circuit coupled between an output terminal of the outer coil and ground.

Claims

1. A match circuit coupled between an RF source and a plasma chamber, the match circuit comprising:

a power input circuit, the power input circuit coupled to an RF source;

an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit;

an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection to ground;

an outer coil input circuit coupled between the first node and an input terminal of an outer coil;

an outer coil output circuit coupled between an output terminal of the outer coil and ground.

2. The match circuit of claim 1,

wherein the capacitor is a variable capacitor having a rating of between about 150 pF to about 1500 pF;

and

wherein the inductor has a value of about 0.3 uH to about 0.5 uH.

3. The match circuit of claim 1, wherein the outer coil input circuit includes a second capacitor.

4. The match circuit of claim 3, wherein the second capacitor is a variable capacitor having a rating of about 150 pF to about 1500 pF.

5. The match circuit of claim 1, wherein the outer coil output circuit includes a second capacitor.

6. The match circuit of claim 5, wherein the second capacitor has a value of about 80 pF to about 120 pF.

7. The match circuit of claim 1, wherein the power input circuit includes a second capacitor coupled to the RF source, a second inductor coupled to the inner coil input circuit, a third capacitor coupled between the second capacitor and the second inductor, a second node being defined between the second capacitor and the third capacitor, and a fourth capacitor coupled between the second node and ground.

8. The match circuit of claim 7,

wherein the second capacitor has a rating of about 5 pF to about 500 pF;

wherein the third capacitor has a rating of about 50 pF to about 500 pF;

wherein the second inductor has a value of about 0.3 uH to about 0.5 uH;

wherein the fourth capacitor has a value of about 200 pF to about 300 pF.

9. A match circuit, comprising:

a power input circuit, the power input circuit coupled to an RF source;

an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a first capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the first capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit;

an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection to ground;

an outer coil input circuit coupled between the first node and an input terminal of an outer coil;

an outer coil output circuit coupled between an output terminal of the outer coil and ground, the outer coil output circuit including a second capacitor having a value greater than 85 pF.

10. The match circuit of claim 9,

wherein the first capacitor is a variable capacitor having a rating of between about 150 pF to about 1500 pF;

and

wherein the inductor has a value of about 0.3 uH to about 0.5 uH.

11. The match circuit of claim 9, wherein the outer coil input circuit includes a third capacitor.

12. The match circuit of claim 11, wherein the third capacitor is a variable capacitor having a rating of about 150 pF to about 1500 pF.

13. The match circuit of claim 9, wherein the power input circuit includes a third capacitor coupled to the RF source, a second inductor coupled to the inner coil input circuit, a fourth capacitor coupled between the third capacitor and the second inductor, a second node being defined between the third capacitor and the fourth capacitor, and a fifth capacitor coupled between the second node and ground.

14. The match circuit of claim 13,

wherein the third capacitor has a rating of about 5 pF to about 500 pF;

wherein the fourth capacitor has a rating of about 50 pF to about 500 pF;

wherein the second inductor has a value of about 0.3 uH to about 0.5 uH;

wherein the fifth capacitor has a value of about 200 pF to about 300 pF.

15. A match circuit, comprising:

a power input circuit, the power input circuit coupled to an RF source;

an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a first capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the first capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit;

an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection to ground;

an outer coil input circuit coupled between the first node and an input terminal of an outer coil, the outer coil input circuit includes a second capacitor;

an outer coil output circuit coupled between an output terminal of the outer coil and ground, the outer coil output circuit including a third capacitor.

16. The match circuit of claim 15,

wherein the first capacitor is a variable capacitor having a rating of between about 150 pF to about 1500 pF;

and

wherein the inductor has a value of about 0.3 uH to about 0.5 uH.

17. The match circuit of claim 15, wherein the second capacitor is a variable capacitor having a rating of about 150 pF to about 1500 pF.

18. The match circuit of claim 15, wherein the third capacitor has a value of about 80 pF to about 120 pF.

19. The match circuit of claim 15, wherein the power input circuit includes a fourth capacitor coupled to the RF source, a second inductor coupled to the inner coil input circuit, a fifth capacitor coupled between the fourth capacitor and the second inductor, a second node being defined between the fourth capacitor and the fifth capacitor, and a sixth capacitor coupled between the second node and ground.

20. The match circuit of claim 19,

wherein the fourth capacitor has a rating of about 5 pF to about 500 pF;

wherein the fifth capacitor has a rating of about 50 pF to about 500 pF;

wherein the second inductor has a value of about 0.3 uH to about 0.5 uH;

wherein the sixth capacitor has a value of about 200 pF to about 300 pF.