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MEMS MULTI-AXIS GYROSCOPE Z-AXIS ELECTRODE STRUCTURE

  • US 20130139592A1
  • Filed: 01/31/2013
  • Published: 06/06/2013
  • Est. Priority Date: 09/18/2010
  • Status: Active Grant
First Claim
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1. A microelectromechanical die for sensing motion, comprising:

  • a substrate;

    a proof-mass coupled to the substrate at an anchor, the proof-mass including;

    a first portion moveable with respect to the anchor, the first portion including a first proof-mass electrode; and

    a second portion, opposite the first portion with respect to the anchor, the second portion moveable with respect to the anchor and the first portion, the second portion including a second proof-mass electrode;

    a first stator coupled to the substrate and including a first stator electrode extending alongside the first proof-mass electrode of the first portion of the proof-mass to form a first electrode pair; and

    a second stator coupled to the substrate and including a second stator electrode, opposite the first stator electrode, and extending alongside the second proof-mass electrode of the second portion of the proof-mass to form a second electrode pair;

    wherein in a first vibratory mode, in which the first portion of the proof-mass is to move away from the second portion of the proof-mass, the proof-mass, first stator electrode and second stator electrode are arranged such that a distance between electrodes of the first electrode pair is inversely proportional to a distance between electrodes of the second electrode pair.

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