TEMPERATURE CONTROL OF A MOVER WITH ACTIVE BYPASS, PREDICTIVE FEEDFORWARD CONTROL, AND PHASE CHANGE HOUSING

• US 20130140372A1
• Filed: 01/31/2013
• Published: 06/06/2013
• Est. Priority Date: 06/30/2011
• Status: Active Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: MAHADESWARASWAMY, Chetan, PHARAND, Michel, BINNARD, Michael B.
• Application Number:
  US13/756,176
• Publication Number:
  US 20130140372A1
• Time in Patent Office: Days
• US Class Current: 236/12.1
• CPC Class Codes: F27D 3/00 Charging; Discharging; Manipulation of charge moving charge through a furnace F27B9/14
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

A stage assembly includes (i) a stage; (ii) a base assembly; (iii) a stage mover, and (iv) a temperature controller. The stage mover includes a magnet array and a conductor array. The conductor array can be grouped into one or more zones. The temperature controller selectively directs a circulation fluid at a first temperature, and at a second temperature to each zone. Feedforward signals based on the expected heat dissipation of the conductor array can be used to improve the response time of the temperature controller. The temperature controller can include a phase change material and a housing assembly that retains the phase change material in an enclosed chamber near the conductor array.

Claims

1. A stage assembly that moves a device, the stage assembly comprising:

a stage that retains the device;

a base assembly;

a stage mover that moves the stage, the stage mover including a magnet array that is secured to one of the stage and the base assembly, and a conductor array that is secured to the other of the stage and the base assembly, the conductor array including a first zone having a first body heat exchanger and a second zone having a second body heat exchanger, wherein current directed to conductor array creates a force that can be used to move one of the arrays relative to the other array;

a temperature controller that includes (i) an inlet valve assembly that is in fluid communication with the first body heat exchanger, and the second body heat exchanger, and (ii) a first temperature system that is in fluid communication with the inlet valve assembly, the first temperature system directing a body circulation fluid at a first temperature, and at a second temperature to the inlet valve assembly, the first temperature being different than the second temperature; and

a control system that controls the inlet valve assembly to selectively control (i) the flow rate of the body circulation fluid at the first temperature, and the flow rate of the body circulation fluid at the second temperature that is directed to the first body heat exchanger, and (ii) the flow rate of the body circulation fluid at the first temperature, and the flow rate of the body circulation fluid at the second temperature that is directed to the second body heat exchanger.

2. The stage assembly of claim 1 further comprising a stage base, and wherein the base assembly includes a countermass that is supported by the stage base, wherein the countermass moves relative to the stage base when the force is created to move one of the arrays relative to the other array.

3. The stage assembly of claim 1 wherein the first temperature system also directs the body circulation fluid at a third temperature to the inlet valve assembly;

wherein the third temperature is different than the first and second temperatures; and

wherein the control system controls the inlet valve assembly to selectively control (i) the flow rate of the body circulation fluid at the first temperature, the flow rate of the body circulation fluid at the second temperature, and the flow rate of the body circulation fluid at the third temperature that is directed to the first body heat exchanger, and (ii) the flow rate of the body circulation fluid at the first temperature, the flow rate of the body circulation fluid at the second temperature, and the flow rate of the body circulation fluid at the third temperature that is directed to the second body heat exchanger.

4. The stage assembly of claim 1 wherein the conductor array includes a third zone having a third body heat exchanger;

wherein the inlet valve assembly is in fluid communication with the third body heat exchanger; and

wherein the control system controls the inlet valve assembly to selectively control the flow rate of the circulation fluid at the first temperature, the flow rate of the circulation fluid at the second temperature, and the flow rate of the circulation fluid at the third temperature that is directed to the third body heat exchanger.

5. The stage assembly of claim 1 wherein the temperature controller includes a first temperature unit that supplies the circulation fluid at the first temperature, a second temperature unit that supplies the circulation fluid at the second temperature, and an outlet valve assembly that selectively routes the circulation fluid exiting the body heat exchangers to each of the temperature units.

6. The stage assembly of claim 5 further comprising a first bypass valve that is controlled to selectively direct the first circulation fluid to flow from an outlet of the first temperature unit to an inlet of the first temperature unit to maintain a predetermined minimum flow in the first temperature unit.

7. The stage assembly of claim 1 wherein the conductor array includes a surface heat exchanger, and wherein the temperature controller includes a second temperature system that directs a second circulation fluid through the surface heat exchanger.

8. The stage assembly of claim 1 wherein the conductor array includes a housing assembly that retains a phase change material in an enclosed chamber near the first body heat exchanger.

9. The stage assembly of claim 1 wherein the stage mover is a planar motor and the conductor array includes a plurality of conductor units that are arranged in a rectangular shaped grid.

10. The stage assembly of claim 1 wherein the control system utilizes feedforward control based on the expected heat dissipation of each zone in the control of the inlet valve assembly.

11. An exposure apparatus for transferring an image from a reticle to a device, the exposure apparatus comprising:

an illumination system that directs an illumination beam at the reticle, and stage assembly of claim 1 moving one of the reticle and the device.

12. A stage assembly that moves a device, the stage assembly comprising:

a stage that retains the device;

a base assembly;

a stage mover that moves the stage along a first axis, the stage mover including a magnet array that is secured to one of the stage and the base assembly, and a conductor array that is secured to the other of the stage and the base assembly, the conductor array including a first zone and a second zone, wherein current directed to the conductor array generates a force on the stage;

a temperature controller that selectively directs a first circulation fluid to the first zone and the second zone; and

a control system that controls the temperature controller to independently control at least one of the flow rate and temperature of the circulation fluid to the first zone and to the second zone, wherein the control system utilizes feedforward control based on the expected heat load for each zone.

13. The stage assembly of claim 12 further comprising a feedback element assembly that provides feedback regarding the first zone and the second zone, and wherein the control system uses feedback control in addition to feedforward control.

14. The stage assembly of claim 12 further comprising a stage base, and wherein the base assembly includes a countermass that is supported by the stage base, wherein the countermass moves relative to the stage base when the force is created to move one of the arrays relative to the other array.

15. The stage assembly of claim 12 wherein the conductor array includes a surface heat exchanger, and wherein the temperature controller includes a second temperature system that directs a second circulation fluid through the surface heat exchanger.

16. A stage assembly that moves a device, the stage assembly comprising:

a stage that retains the device;

a base assembly;

a stage mover that moves the stage, the stage mover including a magnet array that is secured to one of the stage and the base assembly, and a conductor array that is secured to the other of the stage and the base assembly, wherein current directed to the conductor array generates a force on the stage; and

a temperature controller that controls the temperature of the conductor array, the temperature controller including a phase change material and a housing assembly that retains the phase change material in an enclosed chamber near the conductor array.

17. The stage assembly of claim 16 wherein the conductor array includes a first zone having a first body heat exchanger and a second zone having a second body heat exchanger, wherein the temperature controller independently directs a first circulation fluid to the first body heat exchanger and the second body heat exchanger.

18. The stage assembly of claim 16 wherein the stage mover is a planar motor and the conductor array includes a plurality of conductor units that are arranged in a rectangular shaped grid.

19. The stage assembly of claim 16 wherein at least a portion of the phase change material changes between a liquid phase and a solid phase as the heat dissipation of the conductor array changes with time.

20. The stage assembly of claim 16 wherein at least a portion of the phase change material changes between a gaseous phase and a liquid phase as the heat dissipation of the conductor array changes with time.

21. The stage assembly of claim 16 wherein at least a portion of the phase change material changes between a gaseous phase and a liquid phase, and the gaseous and liquid phase change material moves within the enclosed chamber to transfer heat from at least one warmer location to at least one colder location.

22. A stage assembly that moves a device, the stage assembly comprising:

a stage that retains the device;

a base assembly;

a planar mover that moves the stage, the stage mover including a magnet array that is secured to one of the stage and the base assembly, and a conductor array that is secured to the other of the stage and the reaction assembly, the conductor array including a plurality of conductor units that are arranged in a two dimensional array, wherein current directed to one or more of conductor units generates a force on the stage; and

a temperature controller that independently adjusts the temperature of each conductor unit of the conductor array.

23. The stage assembly of claim 22 wherein the temperature controller independently controls at least one of a temperature and a flow rate of a circulation fluid supplied to each conductor unit.

24. The stage assembly of claim 23 wherein the temperatures or flow rates are actively controlled using a valve assembly.

25. The stage assembly of claim 23 wherein the flow rate to each conductor unit is individually controlled with a flow restrictor.