MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS
First Claim
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1. An apparatus, comprising:
- a first microelectromechanical systems MEMS wafer comprising a first MEMS device;
a second MEMS wafer comprising a second MEMS device,wherein the second MEMS wafer is configured to cap the first MEMS wafer.
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Abstract
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
35 Citations
6 Claims
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1. An apparatus, comprising:
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a first microelectromechanical systems MEMS wafer comprising a first MEMS device; a second MEMS wafer comprising a second MEMS device, wherein the second MEMS wafer is configured to cap the first MEMS wafer. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification