SUBSTRATE PROCESSING TOOL SHOWERHEAD

• US 20130145989A1
• Filed: 12/12/2011
• Published: 06/13/2013
• Est. Priority Date: 12/12/2011
• Status: Abandoned Application

• Current Assignee: Intermolecular Incorporated (Merck & Co., Inc.)
• Original Assignee: Intermolecular Incorporated (Merck & Co., Inc.)
• Inventors: Satitpunwaycha, Peter
• Application Number:
  US13/323,281
• Publication Number:
  US 20130145989A1
• Time in Patent Office: Days
• US Class Current: 118/724
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles

Abstract

Embodiments provided herein describe substrate processing tools and showerheads. A substrate processing tool includes a housing defining a processing chamber. A substrate support is coupled to the housing and configured to support a substrate within the processing chamber. A showerhead is coupled to the housing and positioned within the processing chamber above the substrate support. The showerhead includes a dielectric material and has a first surface with a plurality of fluid outlets, a second surface with a plurality of fluid ports, and first and second passageways extending therethrough. The first passageway is in fluid communication with the plurality of fluid outlets and a first of the plurality of fluid ports. The second passageway is in fluid communication with a second and a third of the fluid ports.

Claims

1. A substrate processing tool comprising:

a housing defining a processing chamber;

a substrate support coupled to the housing and configured to support a substrate within the processing chamber; and

a showerhead coupled to the housing and positioned within the processing chamber above the substrate support, the showerhead comprising a dielectric material and having a first surface with a plurality of fluid outlets thereon, a second surface with a plurality of fluid ports thereon, a first passageway extending through the showerhead and in fluid communication with one or more of the plurality of fluid outlets and a first of the fluid ports, and a second passageway extending within the showerhead and in fluid communication with a second and a third of the plurality of fluid ports.

2. The substrate processing tool of claim 1, wherein the plurality of fluid outlets comprises a first set of fluid outlets and a second set of fluid outlets, wherein the first passageway is in fluid communication with the first set of fluid outlets, and wherein the showerhead further comprises a third passageway extending through the showerhead and in fluid communication with the second set of outlets and a fourth of the plurality of fluid ports.

3. The substrate processing tool of claim 2, wherein the first passageway is not in fluid communication with the second passageway within the showerhead.

4. The substrate processing tool of claim 3, wherein the second passageway is not in fluid communication with third passageway within the showerhead.

5. The substrate processing tool of claim 4, wherein the first passageway and the third passageway each comprises a plurality of channels, and wherein the plurality of channels of the first passageway and the plurality of channels of the third passageway are inter-digitated.

6. The substrate processing tool of claim 5, further comprising a first processing fluid supply in fluid communication with the first of the plurality of fluid ports and a second processing fluid supply in fluid communication with the fourth of the plurality of fluid ports.

7. The substrate processing tool of claim 6, further comprising a temperature-controlled coolant supply in fluid communication with the second of the plurality of fluid ports.

8. The substrate processing tool of claim 1, further comprising:

a plurality of conductive members coupled to the housing and positioned below the substrate support; and

a power supply coupled to the conductive members and configured to cause a current to flow through the conductive members.

9. The substrate processing tool of claim 8, wherein the dielectric material comprises silicon carbide, alumina, boron nitride, or a combination thereof.

10. The substrate processing tool of claim 5, wherein the plurality of channels of the first passageway and the third passageway extend in a direction that is substantially parallel to an upper surface of the substrate support.

11. A showerhead for a substrate processing tool comprising:

a body having an upper surface and a lower surface and comprising a dielectric material, the body further comprising

a first passageway extending through the body and operable to deliver a first processing fluid and in fluid communication with at least one fluid outlet on the lower surface of the body, and in fluid communication with a first of a plurality of fluid ports on the upper surface of the body, and

a second passageway extending within the body and operable to deliver coolant fluid and in fluid communication with a second and a third of the plurality of fluid ports on the upper surface of the body,

wherein the first passageway is not in fluid communication with the second passageway.

12. The showerhead of claim 11, wherein the body further comprises a third passageway extending through the body and operable to deliver a second processing fluid and in fluid communication with the at least one fluid outlet on the lower surface of the body and a fourth of the plurality of fluid ports on the upper surface of the body, wherein the third passageway is not in fluid communication with the first passageway within the body.

13. The showerhead of claim 12, wherein the at least one fluid outlet comprises a first set of fluid outlets and a second set of fluid outlets.

14. The showerhead of claim 13, wherein the first set of fluid outlets is in fluid communication with the first passageway, and the second set of fluid outlets is in fluid communication with the third passageway.

15. The showerhead of claim 14, wherein the first passageway and the third passageway each comprises a plurality of channels, and wherein the plurality of channels of the first passageway and the plurality of channels of the third passageway are inter-digitated.

16. A substrate processing system comprising:

a housing defining a processing chamber;

a substrate support coupled to the housing and configured to support a substrate within the processing chamber;

a showerhead coupled to the housing and positioned within the processing chamber above the substrate support, the showerhead having an upper surface and a lower surface and comprising a dielectric material, the showerhead further comprising a first passageway extending through the showerhead and operable to deliver a first processing fluid, a second passageway extending within the showerhead and operable to deliver a coolant fluid, a plurality of fluid outlets on the lower surface, and a plurality of fluid ports on the upper surface, wherein the first passageway is in fluid communication with the plurality of fluid outlets and a first of the plurality of fluid ports, and the second passageway is in fluid communication with a second and a third of the plurality of fluid ports;

at least one processing fluid supply in fluid communication with the first fluid port; and

a temperature-controlled coolant supply in fluid communication with the second fluid port.

17. The substrate processing system of claim 16, further comprising:

a plurality of conductive members coupled to the housing and positioned below the substrate support; and

a power supply coupled to the conductive members and configured to cause a current to flow through the conductive members.

18. The substrate processing system of claim 17, wherein the showerhead further comprises a third passageway extending through the showerhead and operable to deliver a second processing fluid and in fluid communication with the plurality of fluid outlets and a fourth of the plurality of fluid ports on the upper surface, wherein the third passageway is not in fluid communication with the first passageway within the body.

19. The substrate processing system of claim 18, wherein the first passageway and the third passageway each comprises a plurality of channels, and wherein the plurality of channels of the processing fluid passageway and the plurality of channels of the second processing fluid passageway are inter-digitated.

20. The substrate processing system of claim 19, wherein the dielectric material comprises silicon carbide, alumina, boron nitride, or a combination thereof.