Workpiece Detection Mechanism
First Claim
1. A workpiece detection mechanism detecting a workpiece conveyed by a workpiece transfer mechanism in an inside of a vacuum chamber, comprising:
- a sensor part detecting the workpiece;
a sensor amplifier part connected to the sensor part and processing a signal from the sensor part;
a battery part supplying electric power to the sensor amplifier part; and
a wireless transmitting part transmitting by wireless the signal from the sensor amplifier part to an outside of the vacuum chamber, whereinthe sensor part, the sensor amplifier part, the battery part and the wireless transmitting part are provided in one end effector provided in the workpiece transfer mechanism and are not connected directly to any member other than the end effector.
1 Assignment
0 Petitions
Accused Products
Abstract
A workpiece detection mechanism may include a sensor part detecting the workpiece; a sensor amplifier part connected to the sensor part and processing a signal from the sensor part; a battery part supplying electric power to the sensor amplifier part; and a wireless transmitting part transmitting by wireless the signal from the sensor amplifier part to an outside of the vacuum chamber. The sensor part, the sensor amplifier part, the battery part and the wireless transmitting part may be provided in one end effector provided in the workpiece transfer mechanism and are not connected directly to any member other than the end effector.
5 Citations
4 Claims
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1. A workpiece detection mechanism detecting a workpiece conveyed by a workpiece transfer mechanism in an inside of a vacuum chamber, comprising:
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a sensor part detecting the workpiece; a sensor amplifier part connected to the sensor part and processing a signal from the sensor part; a battery part supplying electric power to the sensor amplifier part; and a wireless transmitting part transmitting by wireless the signal from the sensor amplifier part to an outside of the vacuum chamber, wherein the sensor part, the sensor amplifier part, the battery part and the wireless transmitting part are provided in one end effector provided in the workpiece transfer mechanism and are not connected directly to any member other than the end effector. - View Dependent Claims (2, 3, 4)
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Specification