SEMICONDUCTOR DEVICE
First Claim
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1. A semiconductor device comprising:
- a first substrate;
a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode; and
a thin film transistor over the first substrate,a pixel electrode electrically connected to the thin film transistor;
a liquid crystal over the first electrode of the sensor and the pixel electrode; and
a second substrate over the liquid crystal;
wherein each of the plurality of sensors outputs a capacitance change, andwherein each of the first electrode of the sensor and the pixel electrode comprises ITO.
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Abstract
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.
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Citations
15 Claims
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1. A semiconductor device comprising:
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a first substrate; a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode; and a thin film transistor over the first substrate, a pixel electrode electrically connected to the thin film transistor; a liquid crystal over the first electrode of the sensor and the pixel electrode; and a second substrate over the liquid crystal; wherein each of the plurality of sensors outputs a capacitance change, and wherein each of the first electrode of the sensor and the pixel electrode comprises ITO. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor device comprising:
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a first substrate; a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode; and a thin film transistor over the first substrate, a pixel electrode electrically connected to the thin film transistor; a liquid crystal over the first electrode of the sensor and the pixel electrode; and a second substrate over the liquid crystal; wherein the plurality of sensors are arranged in two-dimensions, wherein each of the plurality of sensors outputs a capacitance change, and wherein each of the first electrode of the sensor and the pixel electrode comprises ITO. - View Dependent Claims (7, 8, 9, 10)
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11. A semiconductor device comprising:
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a first substrate; a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode; and a thin film transistor over the first substrate, a pixel electrode electrically connected to the thin film transistor; a liquid crystal over the first electrode of the sensor and the pixel electrode; and a second substrate over the liquid crystal; wherein the plurality of sensors are arranged in a grid, wherein each of the plurality of sensors outputs a capacitance change, and wherein each of the first electrode of the sensor and the pixel electrode comprises ITO. - View Dependent Claims (12, 13, 14, 15)
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Specification