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SENSOR WITH VACUUM CAVITY AND METHOD OF FABRICATION

  • US 20130152694A1
  • Filed: 11/01/2012
  • Published: 06/20/2013
  • Est. Priority Date: 11/01/2011
  • Status: Abandoned Application
First Claim
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1. A MEMS pressure sensor device, comprising:

  • a sensor element positioned on top of a carrier anda cavity, wherein the sensor element hermetically seals the cavity,an electrode coupled to the cavity that forms a pressure transducer together with the sensor element, wherein the cavity is created by a density changing material.

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