SENSOR WITH VACUUM CAVITY AND METHOD OF FABRICATION
First Claim
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1. A MEMS pressure sensor device, comprising:
- a sensor element positioned on top of a carrier anda cavity, wherein the sensor element hermetically seals the cavity,an electrode coupled to the cavity that forms a pressure transducer together with the sensor element, wherein the cavity is created by a density changing material.
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Abstract
A MEMS pressure sensor device comprises a sensor element positioned on top of a carrier and a cavity. The sensor element hermetically seals the cavity. An electrode is coupled to the cavity that forms a pressure transducer together with the sensor element. The cavity is created by a density changing material.
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Citations
1 Claim
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1. A MEMS pressure sensor device, comprising:
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a sensor element positioned on top of a carrier and a cavity, wherein the sensor element hermetically seals the cavity, an electrode coupled to the cavity that forms a pressure transducer together with the sensor element, wherein the cavity is created by a density changing material.
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Specification
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Current AssigneeAndrei Jurievich Pavlov, Urvas, Ilkka, Yelena Vasiljevna Pavlova
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Original AssigneeAndrei Jurievich Pavlov, Urvas, Ilkka, Yelena Vasiljevna Pavlova
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InventorsUrvas, Ilkka, Pavlov, Andrei Jurievich, Pavlova, Yelena Vasiljevna
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Application NumberUS13/666,775Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current73/724CPC Class CodesG01L 9/0048 Details about the mounting ...G01L 9/0073 using a semiconductive diap...
