PLASMA JET ASSEMBLY AND PLASMA BRUSH INCLUDING THE SAME

• US 20130153545A1
• Filed: 09/13/2012
• Published: 06/20/2013
• Est. Priority Date: 12/16/2011
• Status: Active Grant

• Current Assignee: Electronics and Telecommunications Research Institute
• Original Assignee: Electronics and Telecommunications Research Institute
• Inventors: KIM, Yark Yeon, Yu, Han Young, Yun, Yong Ju, Jang, Won Ick, Leong, Eun-ju, Han, Changho
• Granted Patent: US 8,963,044 B2
• Time in Patent Office: Days
• US Class Current: 219/121.5
• CPC Class Codes: A61N 1/44 Applying ionised fluids ion generators H01J37/00
• CPC Class Codes: H05H 1/2418 the electrodes being embedded in the dielectric
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence
• CPC Class Codes: H05H 1/36 Circuit arrangements H05H1/38, H05H1/40 take precedence
• CPC Class Codes: H05H 2245/30 Medical applications

Abstract

Plasma jet assemblies are provided. A plasma jet assembly may include: a tube through which a gas flows; a power source providing a high frequency power exciting the gas in plasma state; a power electrode applying the high frequency power to the gas; and a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.

Claims

1. A plasma jet assembly comprising:

a tube through which a gas flows;

a power source providing a high frequency power exciting the gas in plasma state;

a power electrode applying the high frequency power to the gas; and

a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.

2. The plasma jet assembly of claim 1, wherein the plasma control unit includes a resistor connected between the power source and the power electrode.

3. The plasma jet assembly of claim 2, wherein the plasma control unit further includes a gas control valve controlling a flow rate of the gas flowing in the tube.

4. The plasma jet assembly of claim 3, wherein the gas control valve is disposed at a gas supplying line connected to the tube.

5. The plasma jet assembly of claim 4, wherein the gas supplying line includes a gas line and a connector.

6. The plasma jet assembly of claim 5, wherein the connector includes a pipe having channel holes through which the gas flows.

7. The plasma jet assembly of claim 6, wherein the pipe includes an insulating stick, and the channel holes are disposed around the insulating stick.

8. The plasma jet assembly of claim 1, wherein the power electrode includes a needle disposed in the tube.

9. The plasma jet assembly of claim 8, wherein the power electrode further includes a cladding layer protecting the needle from the plasma gas.

10. The plasma jet assembly of claim 1, wherein the power electrode includes a metal ring surrounding the tube.

11. The plasma jet assembly of claim 1, further comprising:

a ground electrode formed at another side of the tube opposite to the power electrode.

12. The plasma jet assembly of claim 11, wherein the ground electrode includes a metal ring formed an end of the tube.

13. The plasma jet assembly of claim 1, wherein the tube includes a dielectric material.

14. The plasma jet assembly of claim 13, wherein the dielectric material includes alumina or ceramic.

15. A plasma brush comprising:

a frame;

a power source providing a high frequency power; and

plasma jet assemblies fixed at the frame, each of the plasma jet assemblies including a tube through which a gas flows, a power electrode applying the high frequency power to the gas, and a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.

16. The plasma brush of claim 15, further comprising:

a common ground bar disposed another sides of the tubes.

17. The plasma brush of claim 16, further comprising:

a cladding layer protecting the common ground bar from the plasma gas.

18. The plasma brush of claim 15, wherein the plasma control units include resistors connected between the power source and the power electrodes.

19. The plasma brush of claim 18, wherein the plasma control units further include gas control valves controlling flow rates of the gas flowing in the tubes.

20. The plasma brush of claim 18, further comprising:

a common power electrode connected between the power source and the resistors.