ENHANCED EDGE FOCUS TOOL

• US 20130162806A1
• Filed: 12/23/2011
• Published: 06/27/2013
• Est. Priority Date: 12/23/2011
• Status: Abandoned Application

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Ding, Yuhua, Campbell, Shannon Roy, Delaney, Mark Lawrence, Bryll, Robert Kamil
• Application Number:
  US13/336,938
• Publication Number:
  US 20130162806A1
• Time in Patent Office: Days
• US Class Current: 348/86
• CPC Class Codes: G01B 11/028 by measuring lateral position of a boundary of the object G01B11/022, G01B11/024, G01B11/04 take precedence
• CPC Class Codes: G01B 11/0608 Height gauges

Abstract

A method for operating an edge focus tool to focus the optics of a machine vision inspection system proximate to an edge adjacent to a beveled surface feature is provided. The method comprises defining a region of interest (ROI) including the edge in a field of view of the machine vision inspection system; acquiring an image stack of the ROI over a Z range including the edge; generating a point cloud including a Z height for a plurality of points in the ROI, based on determining a best focus Z height measurement for the plurality of points; defining a proximate subset of the point cloud comprising points proximate to the beveled surface feature and corresponding to the shape of the beveled surface feature; defining a Z-extremum subset of the proximate subset of the point cloud; and focusing the optics at a Z height corresponding to the Z-extremum subset.

Claims

1. A method for operating an edge focus tool included in a machine vision inspection system to focus the optics of the machine vision inspection system proximate to an edge adjacent to a beveled surface feature of a workpiece, the method comprising:

defining a region of interest (ROI) including the edge adjacent to the beveled surface feature in a field of view of the machine vision inspection system;

acquiring an image stack of the ROI over a Z range including the edge;

generating a point cloud including a Z height for a plurality of points in the ROI, based on determining a best focus Z height measurement for the plurality of points;

defining a proximate subset of the point cloud comprising points proximate to the beveled surface feature and corresponding to the shape of the beveled surface feature;

defining a Z-extremum subset of the proximate subset of the point cloud; and

focusing the optics at a Z height corresponding to the Z-extremum subset.

2. The method of claim 1, wherein defining a proximate subset of the point cloud comprises:

estimating a surface shape model from the point cloud, the surface shape model corresponding to the shape of the beveled surface feature; and

excluding points of the point cloud which deviate from the surface shape model by more than a relationship parameter.

3. The method of claim 2, wherein estimating a surface shape model from the point cloud and excluding points of the point cloud comprises applying one of a RANSAC and an LMS algorithm to the point cloud.

4. The method of claim 2, wherein the edge tool comprises a graphical user interface (GUI) which includes a shape selection widget in which a user may select which type of surface shape model is estimated from the point cloud during operations of the edge focus tool.

5. The method of claim 2, wherein the surface shape model comprises one of:

a plane, a cone, a cylinder and a sphere.

6. The method of claim 5, wherein a user selects the surface shape model during a learn mode of operation.

7. The method of claim 1, wherein defining a proximate subset of the point cloud comprises:

fitting a surface fit model to the point cloud, the surface fit model corresponding to the shape of the beveled surface feature; and

excluding points of the point cloud which deviate from the surface fit model by more than a minimum surface shape parameter.

8. The method of claim 1, further comprising:

displaying a graphical user interface (GUI) of the edge focus tool in a user interface of the machine vision inspection system; and

operating the GUI to select the ROI to begin operations of the edge focus tool.

9. The method of claim 1, wherein a portion of the ROI includes a portion of the workpiece which is outside of the Z range.

10. The method of claim 1, wherein the Z-extremum subset of the point cloud comprises the lowest Z heights of the point cloud.

11. The method of claim 1, wherein focusing the optics to the Z height corresponding to the Z-extremum comprises moving a stage of the machine vision inspection system such that the workpiece is at that Z height.

12. The method of claim 1, wherein focusing the optics at a Z height corresponding to the Z-extremum subset comprises focusing the optics at a Z height of a point with a Z height which is one of a median, an average, and a mode of the Z-extremum subset of the point cloud.

13. The method of claim 1, wherein generating a point cloud comprises performing autofocus operations for a plurality of sub-ROIs within the ROI, each sub-ROI comprising a subset of pixels of the ROI.

14. A method for operating an edge focus tool to focus the optics of a machine vision inspection system proximate to an edge adjacent to a beveled surface feature, the method comprising:

displaying a graphical user interface (GUI) of the edge focus tool in a user interface of the machine vision inspection system;

operating the GUI to select a region of interest (ROI) including the edge adjacent to the beveled surface feature in a field of view of the machine vision inspection system to begin operations of the edge focus tool; and

operating the edge focus tool to perform the steps of;

acquiring an image stack of the ROI over a Z range including the edge, the ROI including a portion of the field of view where a portion of the workpiece is outside of the Z range;

generating a point cloud including a Z height for a plurality of points in the ROI, based on determining a best focus Z height measurement for the plurality of points;

defining a proximate subset of the point cloud comprising points proximate to the beveled surface feature and corresponding to the shape of the beveled surface feature;

defining a Z-extremum subset of the proximate subset of the point cloud; and

focusing the optics at a Z height corresponding to the Z-extremum subset.

15. An edge focus tool included in a machine vision inspection system, the edge focus tool comprising operations which focus the optics of a machine vision inspection system proximate to an edge adjacent to a beveled surface feature, the edge focus tool comprising a first mode of operation, wherein:

the first mode of operations comprises;

defining a region of interest (ROI) including the edge adjacent to the beveled surface feature in a field of view of the machine vision inspection system;

acquiring an image stack of the ROI over a Z range including the edge;

generating a point cloud including a Z height for a plurality of points in the ROI, based on determining a best focus Z height measurement for the plurality of points;

defining a proximate subset of the point cloud comprising points proximate to the beveled surface feature and corresponding to the shape of the beveled surface feature;

defining a Z-extremum subset of the proximate subset of the point cloud; and

focusing the optics at a Z height corresponding to the Z-extremum subset.

16. The edge focus tool of claim 15, the edge focus tool further comprising a second mode of operation, wherein:

the second mode of operations comprises;

defining a region of interest (ROI) including a edge in a field of view of the machine vision inspection system;

acquiring an image stack of the ROI over a Z range including the edge;

determining a set of image intensity gradients across the edge for the image stack; and

focusing the optics at a Z height which provides the highest gradient in the image stack.

17. The edge focus tool of claim 16, wherein the edge focus tool comprises a widget included in a user interface of the edge focus tool which may be used during a learn mode of the machine vision inspection system to select which of one of the first and second mode of operations will be performed by an instance of the edge focus tool.

18. The edge focus tool of claim 16, wherein the edge focus tool comprises automatic operations performed during a learn mode of the machine vision inspection system to select which of one of the first and second mode of operations will be performed by an instance of the edge focus tool.