MEMS ACCELERATION SENSOR
First Claim
1. An MEMS acceleration sensor, comprising:
- a substrate;
a sensor mass that is disposed parallel to the substrate in an X-Y plane, the sensor mass being attached to the substrate that is rotatable about a rotary axis, the sensor mass comprising a plurality of holes, the weight of the sensor mass being different on the two sides of the rotary axis, the sensor mass including sensor elements for detecting a rotary motion of the sensor mass about the rotary axis; and
wherein in order to change the weight of the sensor mass on one side of the rotary axis relative to the other side of the rotary axis, material of the sensor mass is changed by at least one of the two methods including (a) partially removing material of the sensor mass in the region of some of the plurality of holes for reducing the weight of the sensor mass and (b) adding material of the sensor mass in the Z-direction in the extension of some of the plurality of holes for increasing the weight of the sensor mass.
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Accused Products
Abstract
The present invention relates to a MEMS acceleration sensor comprising a substrate and a sensor mass that is disposed parallel to the substrate in an X-Y plane. The sensor mass is rotatable about a rotary axis, and includes a plurality of holes. The weight of the sensor mass is different on the two sides of the rotary axis. The sensor further includes sensor elements for detecting a rotary motion of the sensor mass about the rotary axis. To change the weight of the sensor mass on one side of the rotary axis relative to the other side, material of the sensor mass is partially removed in some of the holes for reducing the weight of the sensor mass, and/or material of the sensor mass is added in the Z-direction, in particular in the extension of the holes, for increasing the weight of the sensor mass.
22 Citations
11 Claims
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1. An MEMS acceleration sensor, comprising:
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a substrate; a sensor mass that is disposed parallel to the substrate in an X-Y plane, the sensor mass being attached to the substrate that is rotatable about a rotary axis, the sensor mass comprising a plurality of holes, the weight of the sensor mass being different on the two sides of the rotary axis, the sensor mass including sensor elements for detecting a rotary motion of the sensor mass about the rotary axis; and wherein in order to change the weight of the sensor mass on one side of the rotary axis relative to the other side of the rotary axis, material of the sensor mass is changed by at least one of the two methods including (a) partially removing material of the sensor mass in the region of some of the plurality of holes for reducing the weight of the sensor mass and (b) adding material of the sensor mass in the Z-direction in the extension of some of the plurality of holes for increasing the weight of the sensor mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification