ELECTRICAL PROPERTY MEASURING APPARATUS FOR PRESSURE SENSOR AND MEASURING METHOD THEREOF

• US 20130167651A1
• Filed: 03/19/2012
• Published: 07/04/2013
• Est. Priority Date: 12/30/2011
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Lin, Yan-Rung, Liou, Chang-Ho, Ciou, Jyun-Kai
• Granted Patent: US 8,776,607 B2
• Time in Patent Office: Days
• US Class Current: 73/753
• CPC Class Codes: G01L 27/005 Apparatus for calibrating pressure sensors

Abstract

An electrical property measuring apparatus for pressure sensor includes a first plate, a second plate, an object to be measured, an electrical property measuring unit used for measuring the electrical properties of the object, and a fluid supplying system. The second plate is opened or closed relative to the first plate. The object is disposed between the first plate and the second plate. The fluid supplying system connects to a space formed by the first plate and a pressed surface or a space formed by the second plate and a pressed surface. The fluid supplying system provides a fluid to the space such that the fluid presses on the object and the electrical property measuring unit measures the electrical properties of the object. A method of measuring electrical property for pressure sensor is also provided.

Claims

1. An electrical property measuring apparatus for pressure sensor, comprising:

a first plate and a second plate, being opened or closed with each other;

an object to be measured disposed between the first plate and the second plate;

an electrical property measuring unit adapted to measure an electrical property signal of the object; and

a fluid supplying system connected to a space formed by the first plate and a pressed surface, or a space formed by the second plate and a pressed surface, wherein the fluid supplying system provides a fluid to the space so that the fluid presses on the object and the electrical property measuring unit measures the electrical property signal of the object.

2. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, further comprising a flexible element located between the first plate and the second plate, wherein the object and the fluid are separated by the flexible element.

3. The electrical property measuring apparatus for pressure sensor as claimed in claim 2, wherein the flexible element is a thin film having flexibility, elasticity and gas barrier property.

4. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, further comprising a sealing element disposed between the first plate and the second plate and located at a peripheral of the space.

5. The electrical property measuring apparatus for pressure sensor as claimed in claim 4, wherein an annular trench is disposed at the peripheral of the space, and the sealing element is disposed in the annular trench.

6. The electrical property measuring apparatus for pressure sensor as claimed in claim 5, wherein the sealing element is a rubber or a polymer.

7. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the second plate is a fixed supporting platform and the object is adapted to be disposed on the second plate.

8. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the object is one pressure sensor or a plurality of pressure sensors.

9. The electrical property measuring apparatus for pressure sensor as claimed in claim 8, further comprising the plurality of pressure sensors formed by the plurality of pressure sensors being connected to each other and disposing on the flexible element.

10. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the fluid is a gas or a liquid.

11. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the fluid supplying system and the space are linked by a first piping and a second piping, an inlet valve is disposed at the first piping located at an inlet of the space, and an outlet valve is disposed at the second piping located at an outlet of the space, the fluid supplying system is controlled by a controller so that the fluid provided from the fluid supplying system enters the space through the first piping and the inlet valve and leaves the space through the second piping and the outlet valve.

12. The electrical property measuring apparatus for pressure sensor as claimed in claim 11, wherein the fluid supplying system comprises a pump and a fluid tank, or the fluid supplying system comprises a pump.

13. The electrical property measuring apparatus for pressure sensor as claimed in claim 11, wherein the first plate has one or a plurality of first flow paths and one or a plurality of second flow paths, the first flow path and the second flow path are respectively disposed at two sides of the first plate, so that the first flow path is connected to the inlet valve and the second flow path is connected to the outlet valve.

14. The electrical property measuring apparatus for pressure sensor as claimed in claim 13, wherein the flexible element is a bag disposed in the space, and the bag is connected to the first flow path and the second flow path.

15. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein a first recess is formed on the first plate and the second plate is a supporting platform.

16. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein a second recess is formed on the second plate and the first plate is a supporting platform.

17. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the first plate and the second plate respectively form a corresponding first recess and second recess.

18. The electrical property measuring apparatus for pressure sensor as claimed in claim 17, wherein a supporting plate is disposed on the second recess to support the object.

19. The electrical property measuring apparatus for pressure sensor as claimed in claim 17, wherein a supporting plate is disposed on the first recess to support the object.

20. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein a fluid pressure detector is disposed in the space for detecting a fluid pressure variation within the space.

21. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the object has a measuring area and a wiring connecting area surrounding the measuring area, and the object comprises one or a plurality of pressure sensors or a pressure sensor array electrically connected to the wire connecting area respectively, and the wire connecting area is connected to one or a plurality of wires.

22. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein the electrical property measuring unit is a microprocessor.

23. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein a first sealing element and a second sealing element are configured on the second plate, and the first sealing element surrounds the second sealing element.

24. The electrical property measuring apparatus for pressure sensor as claimed in claim 23, wherein the first sealing element and the second sealing element are detachable or assembled to the second plate.

25. The electrical property measuring apparatus for pressure sensor as claimed in claim 23, wherein a first recess is disposed on the first plate, and at least one third flow path and at least one fourth flow path are disposed in the first recess located on the first plate, the third flow path is connected to an inlet valve and the fourth flow path is connected to an outlet valve, the inlet valve and the outlet valve are respectively connected to the fluid supplying system through a first piping and a second piping.

26. The electrical property measuring apparatus for pressure sensor as claimed in claim 25, further comprising a fluid pressure detector disposed in the first recess of the first plate and located within the second sealing element.

27. The electrical property measuring apparatus for pressure sensor as claimed in claim 1, wherein a first sealing element and a second sealing element are disposed on the first plate, and the first sealing element surrounds the second sealing element.

28. The electrical property measuring apparatus for pressure sensor as claimed in claim 27, wherein the first sealing element and the second sealing element are detachable or assembled to the first plate.

29. The electrical property measuring apparatus for pressure sensor as claimed in claim 27, wherein a first recess is disposed on the first plate, so that the second sealing element is located within the first recess, and at least one third flow path and at least one fourth flow path are disposed in the first recess located on the first plate, the third flow path is connected to an inlet valve and the fourth flow path is connected to an outlet valve, the inlet valve and the outlet valve are respectively connected to the fluid supplying system through a first piping and a second piping.

30. The electrical property measuring apparatus for pressure sensor as claimed in claim 29, further comprising a fluid pressure detector disposed in the first recess of the first plate and located in the second sealing element.

31. A method of measuring electrical property for pressure sensor, comprising:

providing a first plate and a second plate;

providing an object to be measured disposed between the first plate and the second plate;

closing the first plate and the second plate;

forming a space between the first plate and a pressed surface, or forming a space between the second plate and a pressed surface;

providing a fluid to the space through a fluid supplying system;

detecting a fluid pressure variation within the space with a fluid pressure detector;

pressing on the object with the fluid; and

measuring an electrical property signal transmitted by the object due to a fluid pressure.

32. The method of measuring electrical property for pressure sensor as claimed in claim 31, further comprising:

providing a thin film, wherein the thin film is located between the first plate and the second plate and contacts with the object so that the fluid in the space presses on the object through the thin film.

33. The method of measuring electrical property for pressure sensor as claimed in claim 31, further comprising:

providing a bag, wherein the bag is disposed in the space, the bag is connected to the fluid supplying system and contacts with the object so that the fluid in the space presses on the object through the bag.

34. The method of measuring electrical property for pressure sensor as claimed in claim 31, wherein the object is one pressure sensor or a plurality of pressure sensors.

35. The method of measuring electrical property for pressure sensor as claimed in claim 34, further comprising:

measuring an electrical property of one of the pressure sensors of the object, and a rest of the pressure sensors which are not measured are electrically grounded.