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DEVICE AND METHOD FOR ION GENERATION

  • US 20130170592A1
  • Filed: 12/28/2011
  • Published: 07/04/2013
  • Est. Priority Date: 12/28/2011
  • Status: Active Grant
First Claim
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1. An ion source comprising:

  • at least one substrate having at least one channel comprising at least one wall, wherein the at least one substrate comprises an interior surface that at least partially defines an interior volume;

    a plurality of nano-tips disposed on the at least one wall of the channel; and

    a housing configured to contain a gas, wherein the at least one substrate is disposed within the housing.

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