ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR
First Claim
1. A rotation rate sensor, comprising:
- a substrate including a main extension plane;
force transmission elements movably fastened to the substrate using detection springs; and
a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces;
wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes.
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Accused Products
Abstract
A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes.
27 Citations
10 Claims
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1. A rotation rate sensor, comprising:
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a substrate including a main extension plane; force transmission elements movably fastened to the substrate using detection springs; and a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces; wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for operating a rotation rate sensor comprising a substrate including a main extension plane, force transmission elements movably fastened to the substrate using detection springs, and a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces, wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes, the method comprising:
exciting the seismic mass to the drive vibration about the drive axis using the drive unit, the drive vibration being coupled into the force transmission elements such that a standing wave is produced in the force transmission elements, the force transmission elements being fixed to the vibrational nodes of the standing wave using the detection springs. - View Dependent Claims (10)
Specification