SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
First Claim
1. A semiconductor device including a wiring layer circuit which is formed over an insulating film and includes at least one inverter element, the inverter element comprising:
- a first transistor element; and
a resistance element connected to the first transistor element via a connection node,the first transistor element including;
a gate electrode embedded in an interlayer insulating film which includes the insulating film;
a gate insulating film formed over the interlayer insulating film and the gate electrode; and
a first semiconductor layer formed over the gate insulating film between a source electrode and a drain electrode, andthe resistance element including,a second semiconductor layer functioning as a resistance,wherein the first semiconductor layer and the second semiconductor layer are formed in the same layer.
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Accused Products
Abstract
A circuit including an inverter is provided for a wiring layer.
A semiconductor device is provided with a wiring layer circuit which is formed over an insulating film and includes at least one inverter element. The inverter is provided with a first transistor element and a resistance element which is connected to the first transistor via a connection node. The first transistor element is provided with a gate electrode which is embedded in an interlayer insulating film including the insulating film, a gate insulating film which is formed over the interlayer insulating film and the gate electrode, and a first semiconductor layer which is formed over the gate insulating film between a source electrode and a drain electrode. The resistance element is provided with a second semiconductor layer which functions as a resistance. The first semiconductor layer and the second semiconductor layer are formed in the same layer.
9 Citations
15 Claims
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1. A semiconductor device including a wiring layer circuit which is formed over an insulating film and includes at least one inverter element, the inverter element comprising:
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a first transistor element; and a resistance element connected to the first transistor element via a connection node, the first transistor element including; a gate electrode embedded in an interlayer insulating film which includes the insulating film; a gate insulating film formed over the interlayer insulating film and the gate electrode; and a first semiconductor layer formed over the gate insulating film between a source electrode and a drain electrode, and the resistance element including, a second semiconductor layer functioning as a resistance, wherein the first semiconductor layer and the second semiconductor layer are formed in the same layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a gate electrode which is embedded in an interlayer insulating film including an insulating layer; forming a gate insulating film over the interlayer insulating film and the gate electrode; and forming a semiconductor layer over the gate insulating film so as to cover the gate electrode in a transistor region via the gate insulating film. - View Dependent Claims (15)
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Specification