MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE
First Claim
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1. A micromechanical structure, comprising:
- a substrate which has a main plane of extension; and
a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring, wherein at least one first subregion of the movable mass is at least partially situated between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension.
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Abstract
A micromechanical structure includes: a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring. A first subregion of the movable mass is situated, at least partially, between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension.
9 Citations
11 Claims
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1. A micromechanical structure, comprising:
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a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring, wherein at least one first subregion of the movable mass is at least partially situated between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing a micromechanical structure, comprising:
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in a first step, providing a substrate; in a second step, providing the first functional layer and providing a first subregion of a movable mass in the first functional layer; and in a third step, providing a second functional layer and providing a coupling spring in the second functional layer in such a way that the first subregion is situated between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to a main plane of extension of the substrate, and wherein the movable mass is elastically suspended via the coupling spring. - View Dependent Claims (11)
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Specification