Packaging Platform For Opto-Electronic Assemblies Using Silicon-Based Turning Mirrors

• US 20130188970A1
• Filed: 01/19/2013
• Published: 07/25/2013
• Est. Priority Date: 01/19/2012
• Status: Abandoned Application

• Current Assignee: Cisco Technology, Inc. (Cisco Systems, Inc.)
• Original Assignee: Cisco Technology, Inc. (Cisco Systems, Inc.)
• Inventors: Shastri, Kalpendu, Patel, Vipulkumar, Pathak, Soham, Chakrabarti, Utpal, Dama, Bipin, Kachru, Ravinder, Desai, Kishor
• Application Number:
  US13/745,773
• Publication Number:
  US 20130188970A1
• Time in Patent Office: Days
• US Class Current: 398/201
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3692 with surface micromachining involving etching, e.g. wet or dry etching steps surface micromachining involving subtractive techniques B81C1/00055
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence
• CPC Class Codes: G02B 6/4256 Details of housings
• CPC Class Codes: G02B 6/4292 the light guide being disconnectable from the opto-electronic element, e.g. mutually self aligning arrangements
• CPC Class Codes: H04B 10/501 Structural aspects
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

An apparatus for transmitting optical signals includes an interposer for supporting opto-electronic components used to create optical output signals. An enclosure is used to encapsulate the populated interposer assembly and includes a silicon sidewall and a transparent lid. The sidewall is etched to include a turning mirror feature with a reflecting surface at a predetermined angle θ, the turning mirror disposed to intercept the optical output signals and re-direct them through the enclosure'"'"'s transparent lid. A coverplate is disposed over and aligned with the enclosure, where the coverplate includes a silicon sidewall member that is etched to include a turning mirror element with a reflecting surface at the same angle θ as the enclosure'"'"'s turning mirror element. The optical signals re-directed by the enclosure then pass through the transparent lid of the enclosure, impinge the turning mirror element of the coverplate, and are then re-directed along the longitudinal axis.

Claims

1. An apparatus comprising

an interposer substrate for supporting a plurality of opto-electronic components for creating optical output signals propagating along a longitudinal optical axis

an enclosure covering the interposer substrate, the enclosure including a silicon sidewall member and a transparent lid, the silicon sidewall member etched to include a turning mirror element with a reflecting surface at a predetermined angle θ

, the turning mirror element for intercepting the created optical output signals and re-directing the created optical output signals through the transparent lid; and

a coverplate disposed over and aligned with the enclosure, the coverplate including a silicon sidewall member etched to include a turning mirror element with a reflecting surface at the same predetermined angle θ

, the coverplate turning mirror element for re-directing the optical output signals along the longitudinal axis.

2. The apparatus as defined in claim 1 wherein the enclosure silicon sidewall member and the coverplate silicon sidewall member are formed of <

100>

silicon and etched along the {111} plane to form reflecting surfaces at a predetermined angle of 54.7°

.

3. The apparatus as defined in claim 1 wherein the enclosure is attached to the interposer using an adhesive that creates a hermetic structure.

4. The apparatus as defined in claim 1 wherein the reflecting surface of the enclosure turning mirror element is coated with a material to increase its reflectivity.

5. The apparatus as defined in claim 4 wherein the reflecting surface is coated with a metallic coating.

6. The apparatus as defined in claim 4 wherein the reflecting surface is coated with a plurality of layers of dielectric material.

7. The apparatus as defined in claim 1 wherein the reflecting surface of the coverplate turning mirror element is coated with a material to increase its reflectivity.

8. The apparatus as defined in claim 7 wherein the reflecting surface is coated with a metallic coating.

9. The apparatus as defined in claim 7 wherein the reflecting surface is coated with a plurality of layers of dielectric material.

10. The apparatus as defined in claim 1 wherein the transparent lid is coated with an anti-reflective material.

11. The apparatus as defined in claim 1 wherein the coverplate includes a transparent lid disposed over and attached to the coverplate silicon sidewall member.

12. An apparatus comprising

an interposer substrate for supporting a plurality of opto-electronic components for creating optical output signals propagating along a longitudinal optical axis

an enclosure covering the interposer substrate, the enclosure including a silicon sidewall member and a transparent lid, the silicon sidewall member etched to include a turning mirror element with a reflecting surface at a predetermined angle θ

, the turning mirror element for intercepting the created optical output signals and re-directing the created optical output signals through the transparent lid;

a coverplate disposed over and aligned with the enclosure, the coverplate including a silicon sidewall member etched to include a turning mirror element with a reflecting surface at the same predetermined angle θ

, the coverplate turning mirror element for re-directing the optical output signals along the longitudinal axis, the silicon sidewall member further etched to include a pair of angled guiding features disposed on parallel surfaces orthogonal to the turning mirror element; and

a silicon array connector for coupling with the coverplate, the silicon array connector including a plurality of optical signal paths for receiving the output optical signals disposed in a silicon housing, the silicon housing including angled guiding features etched on opposing faces for engaging with the coverplate guiding features and aligning the plurality of optical signal paths with the output optical signals.

13. The apparatus as defined in claim 12 wherein the plurality of optical signal paths in the silicon array connector comprises a plurality of optical fibers.

14. The apparatus as defined in claim 12 wherein the plurality of optical signal paths in the silicon array connector comprises a plurality of integrated optical waveguides formed in a silicon substrate.

15. The apparatus as defined in claim 12 wherein the enclosure silicon sidewall member and the coverplate silicon sidewall member are formed of <

100>

silicon and etched along the {111} plane to form reflecting surfaces at a predetermined angle of 54.7°

.

16. The apparatus as defined in claim 12 wherein the connector array is removably coupled to the coverplate.

17. The apparatus as defined in claim 12 wherein the connector array further comprises a lens array for coupling the optical output signals into the connector array optical signal paths.

18. A method comprising the steps of:

providing an interposer substrate including a plurality of opto-electronic components for creating optical output signals and;

placing an enclosure over the interposer substrate in an aligned arrangement, the enclosure comprising a transparent lid and a silicon sidewall member etched to include a turning mirror element with a reflecting surface at a predetermined angle θ

, the turning mirror element aligned with the interposer for intercepting the created optical output signals and re-directing the created optical output signals through the transparent lid;

attaching an aligned silicon coverplate to the transparent lid of the enclosure, the silicon coverplate including a silicon sidewall member etched to include a turning mirror element with a reflecting surface at the same predetermined angle θ

, the coverplate turning mirror element for re-directing the optical output signals along the longitudinal axis;

inserting a silicon array connector into coverplate; and

aligning a plurality of optical signal paths in the silicon array connector with the optical output signals.

19. The method as defined in claim 18 wherein the silicon sidewall members are formed of <

100>

silicon and etched along the {111} crystallographic plane to form a predetermined angle θ

of 54.7°

.

20. The method as defined in claim 18 wherein the method further includes the step of

coating the enclosure turning mirror reflecting surface and the coverplate turning mirror reflecting surface with a highly reflective material.