EFFICIENT TRANSFER OF MATERIALS IN MANUFACTURING

• US 20130190915A1
• Filed: 01/21/2013
• Published: 07/25/2013
• Est. Priority Date: 01/19/2012
• Status: Active Grant

• Current Assignee: Globalfoundries Singapore Pte Limited (GlobalFoundries, Inc.)
• Original Assignee: Globalfoundries Singapore Pte Limited (GlobalFoundries, Inc.)
• Inventors: CHOO, Weng Cheong, BUI, Vei Tzee @ Kelvin, ZHANG, Yuanfeng, TAN, Ting Lik, Edmund, LEONG, Chee Wai, HWANG, Jong Youn, LEE, Shin Yit, TEY, Wee Jin, TING, Kah Hing, CHUA, Ai Ling, Nancy
• Granted Patent: US 9,846,415 B2
• Time in Patent Office: Days
• US Class Current: 700/113
• CPC Class Codes: G05B 11/01 electric
• CPC Class Codes: G05B 19/4189 characterised by the transport system
• CPC Class Codes: G05B 2219/31002 Computer controlled agv conveys workpieces between buffer and cell
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/60 Electric or hybrid propulsion means for production processes

Abstract

Methods for manufacturing automation and a computer executed automated handling system for forming a device are presented. The method includes issuing a transfer request by a tool. The transfer request is processed by a production control system configured for tracking and controlling the flow of carriers. The processing of the transfer request includes selecting a carrier containing production material. A transport system having transport and load/unload (U/L) units in a production area to effect a transfer is controlled and the carrier is transferred by the transport system.

Claims

1. A method for manufacturing automation comprising:

issuing a transfer request by a tool; and

processing the transfer request by a production control system configured for tracking and controlling the flow of carriers comprising

selecting a carrier containing production material,

controlling a transport system comprising transport and load/unload (U/L) units in a production area to effect a transfer, and

transferring the carrier by the transport system.

2. The method of claim 1 wherein the transport and load/unload (U/L) units comprise automated guided vehicles (AGV) transport and AGV U/L units.

3. The method of claim 2 wherein the transfer request comprises a load request or an unload request.

4. The method of claim 3 wherein:

the tool comprises an equipment manager (EM) for controlling the operation of the tool; and

the production control system comprises

a manufacturing execution system (MES) configured to track carrier information and status of the tool,

an activity manager automation (AMA) module comprising an AMA database having tables to track information related to production facility and is configured to select the carrier and issue a dispatch request to effect the transfer,

an area server module configured to receive the transfer request from the EM and updates the AMA database, and

an AGV manager module configured to instruct and control the transport system.

5. The method of claim 4 wherein the transfer request is a load request and the load request is issued by the EM to the area server module, and further comprising:

updating the AMA database with the load request;

performing a load logic which includes obtaining a dispatch lot list from a real time dispatcher (RTD) module by the AMA module; and

issuing a job request to the AGV manager to transfer the selected carrier to the tool.

6. The method of claim 5 wherein when the carrier is transferred to the tool, the method comprising:

issuing a carrier state message by the EM to the area server module;

performing a validation logic by the area server module; and

updating the AMA database after performing the validation logic.

7. The method of claim 4 wherein the transfer request is an unload request and the unload request is issued by the EM to the area server module, and further comprising:

updating the AMA database with the unload request;

performing an unload logic by the AMA module; and

issuing a job request to the AGV manager to transfer the carrier having the processing material which the tool has completed processing from the tool.

8. The method of claim 7 wherein when the carrier is transferred out from the tool, the method comprising:

issuing a carrier state message by the EM to the area server module; and

updating the AMA database after issuing the carrier state message.

9. The method of claim 1 wherein the production material comprises material for forming a device or a processing material which the tool has completed processing.

10. The method of claim 1 wherein the carrier is a wafer carrier capable of containing a plurality of wafers used in forming semiconductor devices, the plurality of wafers form a lot of wafers.

11. A computer executed automated handling system for forming a device comprising:

a production control system configured for tracking and controlling the flow of carriers in a production area comprising

a manufacturing execution system (MES) configured to track carrier information and status of the tool,

an activity manager automation (AMA) module comprising an AMA database having tables to track information related to production facility and is configured to select a carrier and issue a dispatch request to effect a transfer of the selected carrier,

an area server module configured to receive a transfer request from the tool and updates the AMA database, and

an automated guided vehicles (AGV) manager module configured to instruct and control a transport system to effect the transfer of the selected carrier.

12. The computer executed system of claim 11 comprising:

a real time dispatcher (RTD) module comprising a dispatching lot list ranked by priority.

13. The computer executed automated handling system of claim 11 further comprising:

an equipment manager (EM) for controlling operation of a tool in the production area, wherein the EM is communicatively coupled to the production control system.

14. The computer executed automated handling system of claim 13 wherein the EM is communicatively coupled to the area server module.

15. A method of manufacturing devices comprising:

processing a carrier containing production material in a tool;

detecting a conversion in status of the carrier to a ready to unload state;

issuing a transfer request by the tool; and

processing the transfer request by a production control system configured for tracking and controlling the flow of carriers comprising

controlling a transport system comprising transport and load/unload (U/L) units in a production area to effect a transfer, and

dispatching a selected transport system to pick up the carrier from the tool.

16. The method of claim 15 wherein the carrier is a wafer carrier capable of containing a plurality of wafers used in forming semiconductor devices, the plurality of wafers form a lot of wafers.

17. The method of claim 15 wherein the transfer request is an unload request and comprising:

updating a database with the unload request;

performing an unload logic; and

issuing a job request to transfer the carrier containing the production material which the tool has completed processing from the tool.

18. The method of claim 17 wherein when the carrier is transferred out from the tool, the method comprising:

issuing a carrier state message; and

updating the database after issuing the carrier state message.

19. The method of claim 15 wherein the transport and load/unload (U/L) units comprise automated guided vehicles (AGV) transport and AGV U/L units.

20. A non-transitory computer readable medium having stored thereon program code, the program code executable by a computer for manufacturing automation comprising:

receiving a transfer request by a tool in a production area; and

processing the transfer request comprising

selecting a carrier containing production material;

controlling a transport system comprising transport and load/unload (U/L) units in a production area to effect a transfer, and

transferring the carrier by the transport system.