VIBRATION TOLERANT ACCELERATION SENSOR STRUCTURE
First Claim
1. A MEMS structure, comprising an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation, whereinthe MEMS structure comprises a spring structure that extends from the seismic mass to the anchor;
- at least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and
is attached to one end of the spring.
2 Assignments
0 Petitions
Accused Products
Abstract
A MEMS structure comprises an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation. Errors from unwanted vibration modes are reduced by including in the MEMS structure a spring structure that extends from the seismic mass to the anchor. Said spring structure comprises a side arm that is connected to the seismic mass or the anchor. At least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and is attached to one end of the spring.
22 Citations
17 Claims
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1. A MEMS structure, comprising an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation, wherein
the MEMS structure comprises a spring structure that extends from the seismic mass to the anchor; at least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and
is attached to one end of the spring.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
Specification