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Vibration Robust X-Axis Ring Gyro Transducer

  • US 20130192363A1
  • Filed: 01/31/2012
  • Published: 08/01/2013
  • Est. Priority Date: 01/31/2012
  • Status: Active Grant
First Claim
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1. A MEMS sensor, comprising:

  • a substrate;

    first and second electrode pairs positioned in relation to a center line axis; and

    first and second gyro sensors disposed along the center line axis and positioned in spaced apart relationship above a surface of the substrate, the first and second gyro sensors and comprising first and second sense mass elements positioned over the first and second electrode pairs, respectively, where the first and second sense mass elements are adapted to synchronously oscillate in phase together around the center line axis in response to rotational acceleration of the sensor around the center line axis, and to synchronously oscillate anti-phase to one another around the center line axis in response to rotational velocity of the sensor around the center line axis.

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