Vibration Robust X-Axis Ring Gyro Transducer
First Claim
Patent Images
1. A MEMS sensor, comprising:
- a substrate;
first and second electrode pairs positioned in relation to a center line axis; and
first and second gyro sensors disposed along the center line axis and positioned in spaced apart relationship above a surface of the substrate, the first and second gyro sensors and comprising first and second sense mass elements positioned over the first and second electrode pairs, respectively, where the first and second sense mass elements are adapted to synchronously oscillate in phase together around the center line axis in response to rotational acceleration of the sensor around the center line axis, and to synchronously oscillate anti-phase to one another around the center line axis in response to rotational velocity of the sensor around the center line axis.
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Abstract
A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.
41 Citations
25 Claims
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1. A MEMS sensor, comprising:
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a substrate; first and second electrode pairs positioned in relation to a center line axis; and first and second gyro sensors disposed along the center line axis and positioned in spaced apart relationship above a surface of the substrate, the first and second gyro sensors and comprising first and second sense mass elements positioned over the first and second electrode pairs, respectively, where the first and second sense mass elements are adapted to synchronously oscillate in phase together around the center line axis in response to rotational acceleration of the sensor around the center line axis, and to synchronously oscillate anti-phase to one another around the center line axis in response to rotational velocity of the sensor around the center line axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A sensor, comprising:
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a substrate; first and second electrode pairs symmetrically positioned in relation to a center line axis; and first and second symmetric mass transducers symmetrically disposed side-by-side along the center line axis and configured for synchronous in-plane oscillation in opposition to one another, where the first and second symmetric mass transducers are adapted for co-rotational motion relative to the center line axis in response to rotational motion of the sensor around the center line axis, and are adapted for counter rotational motion relative to the center line axis in response to a rotational acceleration force around the center line axis. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of sensing rotational motion of a lateral axis sensor about a rotational sense axis, comprising:
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imparting synchronous in-plane oscillatory motion to first and second symmetric mass transducers symmetrically disposed side-by-side along the rotational sense axis so that the first and second symmetric mass transducers oscillate in opposition to one another; measuring rotational motion of the lateral axis sensor about the rotational sense axis using first and second electrode pairs positioned under the first and second symmetric mass transducers and symmetrically positioned in relation to a rotational sense axis, where the first and second symmetric mass transducers are adapted for co-rotational motion relative to the rotational sense axis in response to rotational motion of the sensor around the rotational sense axis, and are adapted for counter rotational motion relative to the rotational sense axis in response to a rotational acceleration force around the rotational sense axis. - View Dependent Claims (22, 23, 24, 25)
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Specification