MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS
First Claim
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1. A proof-mass for an accelerometer, the proof mass comprising:
- a center portion configured to anchor the proof-mass to an adjacent layer;
a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis;
a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane;
wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
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Abstract
This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
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Citations
20 Claims
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1. A proof-mass for an accelerometer, the proof mass comprising:
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a center portion configured to anchor the proof-mass to an adjacent layer; a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis; a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane; wherein the first z-axis portion is configured to rotate independent of the second z-axis portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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accelerating a proof mass along a z-axis direction; rotating a first z-axis portion of the proof mass in a first rotational direct about a first axis lying in an x-y-plane using a first hinge, the rotation of the first z-axis portion of the proof mass responsive to the acceleration of the proof mass in the z-axis direction; and rotating a second z-axis portion of the proof mass in a second rotational direct about a second axis lying in an x-y-plane using a second hinge, the rotation of the second z-axis portion of the proof mass responsive to the acceleration of the proof mass in the z-axis direction; and wherein the first rotational direction is opposite the second rotational direction using a point of reference outside a perimeter of the proof mass.
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12. An apparatus comprising:
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a single proof mass accelerometer, the single proof mass accelerometer including; a single proof mass formed in the x-y plane of a device layer, the single proof mass including; a central portion including; a single, central anchor, configured to suspend the single proof-mass; and separate x, y, flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor; a first z-axis portion configure to rotate about a first axis in the x-y plane using a first hinge, the first hinge coupled to the central portion; a second z-axis portion configure to rotate about a second axis in the x-y plane using a second hinge, the second hinge coupled to the central portion; wherein the first z-axis portion is configured to rotate independent of the second z-axis portion. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification