MONOLITHIC TRIAXIAL GYRO WITH IMPROVED MAIN MASSES AND COUPLING MASS COUPLED WITH THE EACH OTHER

• US 20130192365A1
• Filed: 07/30/2012
• Published: 08/01/2013
• Est. Priority Date: 02/01/2012
• Status: Abandoned Application

• Current Assignee: Memsensing Microsystems Technology Co Ltd
• Original Assignee: Memsensing Microsystems Technology Co Ltd
• Inventors: Li, Gang, Zhuang, Rui-Fen
• Application Number:
  US13/561,278
• Publication Number:
  US 20130192365A1
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5733 Structural details or topology

Abstract

A monolithic triaxial gyro includes a mass block, a number of electrode groups and a drive comb group. The mass block includes main masses and a coupling mass coupled with the main masses. The main masses are positioned on opposite sides of the coupling mass and are symmetrical with each other along a Y-axis. The electrode groups include a first electrode group within an orthographic projection of the mass block, a second electrode group within an orthographic projection of the coupling mass and a third electrode group including a group of immovable slender flat plates and a group of movable slender flat plates. The drive comb group is connected to the main masses for driving movement of the main masses when signals are inputted into the drive comb group.

Claims

1. A monolithic triaxial gyro comprising:

a mass block comprising an even number of main masses and a coupling mass coupled with the main masses, the main masses being positioned on opposite sides of the coupling mass and being symmetrical with each other along a Y-axis;

a plurality of electrode groups comprising a first electrode group, a second electrode group and a third electrode group, gaps being formed between the first electrode group and the mass block and the second electrode group and the mass block, respectively, the first electrode group being positioned on opposite sides of the second electrode group and being arranged symmetrically with each other along the Y-axis, the first electrode group being within an orthographic projection of the mass block and the second electrode group being within an orthographic projection of the coupling mass, the third electrode group comprising a group of immovable slender flat plates and a group of movable slender flat plates, the third electrode group being connected to the main masses through a resilient component; and

a drive comb group connected to the main masses for driving movement of the main masses when signals are inputted into the drive comb group.

2. The monolithic triaxial gyro as claimed in claim 1, further comprising a first anchor connected to the main masses and a second anchor connected to the coupling mass.

3. The monolithic triaxial gyro as claimed in claim 2, wherein the first anchor is connected to the main masses through a first resilient component and the second anchor is connected to the coupling mass through a second resilient component.

4. The monolithic triaxial gyro as claimed in claim 3, wherein the first resilient component comprises a long beam connected to the main masses and a short beam connected to the first anchor.

5. The monolithic triaxial gyro as claimed in claim 1, further comprising a detect comb group which cooperates with the drive comb group to form a closed-loop negative feedback system.

6. The monolithic triaxial gyro as claimed in claim 1, wherein the first electrode group is within an orthographic projection of the main masses.

7. The monolithic triaxial gyro as claimed in claim 1, wherein the first electrode group is within the orthographic projection of the coupling mass.

8. The monolithic triaxial gyro as claimed in claim 1, wherein the third electrode group is arranged symmetrically with each other in the main masses along the Y-axis.

9. The monolithic triaxial gyro as claimed in claim 1, wherein the resilient component comprises a support beam.

10. The monolithic triaxial gyro as claimed in claim 1, wherein the drive comb group comprises a plurality of drive combs each of which comprises a movable drive comb and an immovable drive comb.

11. The monolithic triaxial gyro as claimed in claim 1, wherein the main masses and the coupling mass are coupled with each other through a coupling beam.

12. The monolithic triaxial gyro as claimed in claim 11, wherein the coupling beam is I-shaped.

13. The monolithic triaxial gyro as claimed in claim 3, wherein the main masses comprise a first mass and a second mass, and the first resilient component is provided with high elasticity along the Y-axis and high rigidity along an X-axis perpendicular to the Y-axis so that displacements of the first mass and the second mass only generate along the Y-axis.

14. The monolithic triaxial gyro as claimed in claim 13, wherein the coupling mass is torsional along a Z-axis perpendicular to both the X-axis and the Y-axis under the vibration of the first mass and the second mass.

15. The monolithic triaxial gyro as claimed in claim 13, further comprising a second resilient component connected to the second anchor and the coupling mass.

16. The monolithic triaxial gyro as claimed in claim 15, wherein the second resilient component comprises four intercrossed beams symmetrical to both the X-axis and the Y-axis.

17. The monolithic triaxial gyro as claimed in claim 1, wherein the main masses comprise a first mass, a second mass, a third mass and a fourth mass, the first mass and the second mass being symmetrical to the third mass and the fourth mass along the Y-axis.

18. The monolithic triaxial gyro as claimed in claim 13, further comprising a base for supporting the mass block, the first anchor and the second anchor being connected to the base.

19. The monolithic triaxial gyro as claimed in claim 18, wherein when angular velocity signals are inputted from an X-axis direction, the first mass and the second mass function as a drive mass and vibrate reciprocatively along opposite directions of the Y-axis, the first mass generates a replacement far from the base along a positive Y-axis direction, and the second mass generates another replacement near to the base along a negative Y-axis direction.

20. The monolithic triaxial gyro as claimed in claim 18, wherein when angular velocity signals are inputted from a Y-axis direction, the coupling mass functions as a drive mass, the coupling mass generates a replacement far from the base along a positive Z-axis direction and simultaneously generates another replacement near to the base along a negative Z-axis direction.