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MONOLITHIC TRIAXIAL GYRO WITH IMPROVED MAIN MASSES AND COUPLING MASS COUPLED WITH THE EACH OTHER

  • US 20130192365A1
  • Filed: 07/30/2012
  • Published: 08/01/2013
  • Est. Priority Date: 02/01/2012
  • Status: Abandoned Application
First Claim
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1. A monolithic triaxial gyro comprising:

  • a mass block comprising an even number of main masses and a coupling mass coupled with the main masses, the main masses being positioned on opposite sides of the coupling mass and being symmetrical with each other along a Y-axis;

    a plurality of electrode groups comprising a first electrode group, a second electrode group and a third electrode group, gaps being formed between the first electrode group and the mass block and the second electrode group and the mass block, respectively, the first electrode group being positioned on opposite sides of the second electrode group and being arranged symmetrically with each other along the Y-axis, the first electrode group being within an orthographic projection of the mass block and the second electrode group being within an orthographic projection of the coupling mass, the third electrode group comprising a group of immovable slender flat plates and a group of movable slender flat plates, the third electrode group being connected to the main masses through a resilient component; and

    a drive comb group connected to the main masses for driving movement of the main masses when signals are inputted into the drive comb group.

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