Energy harvesting with a micro-electro-machanical system (MEMS)

• US 20130193930A1
• Filed: 01/31/2012
• Published: 08/01/2013
• Est. Priority Date: 01/31/2012
• Status: Active Grant

• Current Assignee: Duality Reality Energy, LLC
• Original Assignee: Duality Reality Energy, LLC
• Inventors: Baugher, Jeffrey Paul
• Granted Patent: US 9,076,961 B2
• Time in Patent Office: Days
• US Class Current: 320/137
• CPC Class Codes: F03G 7/00 Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
• CPC Class Codes: H02N 2/18 producing electrical output from mechanical input, e.g. generators for measurement devices G01
• CPC Class Codes: H02N 2/186 Vibration harvesters
• CPC Class Codes: H10N 30/308 Membrane type

Abstract

Apparatuses and method are described to create an energy harvesting microstructure, referred to herein as a transduction micro-electro mechanical system (T-MEMS). A T-MEMS includes a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate. The first buckled membrane further includes a transduction material, a first conductor, the first conductor is applied to a first area of the transduction material; and a second conductor, the second conductor is applied to a second area of the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.

Claims

1. An energy harvesting microstructure, comprising:

a substrate,

a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate, the first buckled membrane further comprising;

a transduction material,

a first conductor, the first conductor is applied to the transduction material; and

a second conductor, the second conductor is applied to the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.

2. The microstructure of claim 1, further comprising:

a mass, the mass is mechanically coupled to move with the transduction material.

3. The microstructure of claim 1, wherein the transduction material is selected from the group consisting of PVDF, Polyimide, PZT, AlN, ZnO and a user defined material.

4. The microstructure of claim 1, wherein the transduction material is poled within a plane of the first buckled membrane.

5. The microstructure of claim 4, wherein the first conductor and the second conductor extend along a thickness of the transduction material.

6. The microstructure of claim 4, wherein the second conductor is in contact with a second transduction material.

7. The microstructure of claim 4, wherein the first conductor is located within the transduction material.

8. The microstructure of claim 1, wherein the transduction material is poled perpendicular to a plane of the first buckled membrane.

9. The microstructure of claim 8, wherein the first conductor and the second conductor extend along a length of the transduction material.

10. The microstructure of claim 9, wherein the transduction material is in the shape of a layer.

11. A microstructure for harvesting energy, comprising:

a first substrate;

a first buckled membrane, the first buckled membrane is connected to the first substrate, the first buckled membrane has a first transduction material;

a second substrate; and

a second buckled membrane, the second buckled membrane is connected to the second substrate;

the first buckled membrane and the second buckled membrane are in contact over a contact area, electrical charge is available for harvesting in the first transduction material when the buckled membranes flex along one of their mutually opposite buckling directions.

12. The microstructure of claim 11, wherein the second buckled membrane has a second transduction material, the contact area is sized to create substantially a zero stiffness when the buckled membranes are flexed along one of their mutually opposite buckling directions, and electrical charge is available for harvesting in at least one of the first transduction material and the second transduction material.

13. The microstructure of claim 12, further comprising;

a mass, the mass is mechanically coupled to move with the contact area.

14. The microstructure of claim 11, wherein the first transduction material is poled using a first conductor and a second conductor, the first transduction material is poled within a plane of the first buckled membrane.

15. The microstructure of claim 12, wherein the second transduction material is poled using a first conductor and a second conductor, the second transduction material is poled within a plane of the second buckled membrane.

16. The microstructure of claim 14, wherein the first conductor is located within the first transduction material.

17. The microstructure of claim 15, wherein the first conductor is located within the second transduction material.

18. The microstructure of claim 11, the first transduction material is poled perpendicular to a plane of the first buckled membrane.

19. The microstructure of claim 12, wherein the second transduction material is poled perpendicular to a plane of the second buckled membrane.

20. The microstructure of claim 18, wherein the first conductor and the second conductor extend along a length of the transduction material.

21. The microstructure of claim 20, wherein the transduction material is in the shape of a layer.

22. The microstructure of claim 12, wherein energy is harvested from the first transduction material while energy is not harvested from the second transduction material.

23. The microstructure of claim 12, wherein energy is harvested from the first transduction material and the second transduction material.

24. The microstructure of claim 23, wherein the first transduction material and the second transduction material together form a single electrical circuit.

25. The microstructure of claim 23, wherein the first buckled membrane further comprises an additional transduction material.

26. The microstructure of claim 25, wherein the first transduction material occupies a larger volume than the additional transduction material occupies.

27. The microstructure of claim 11, wherein the first transduction material is selected from the group consisting of PVDF, Polyimide, PZT, AlN, ZnO and a user defined material.

28. The microstructure of claim 12, wherein the second transduction material is selected from the group consisting of PVDF, Polyimide, PZT, AlN, ZnO and a user defined material

29. A method to harvest energy with a microstructure, comprising:

providing a first potential energy stop; and

providing a second potential energy stop, wherein the first potential energy stop and the second potential energy stop are separated by a distance, such that a pair of opposing buckled membranes can flex between the first potential energy stop and the second potential energy stop as a contact area of the opposing buckled membranes translates along a buckling axis, the opposing buckled membranes are formed with a first buckled membrane and a second buckled membrane; and

harvesting energy from at least one layer of the opposing buckled membranes when the contact area of the opposing buckled membranes translate along the buckling axis.

30. The method of claim 29, wherein the harvesting is from a transduction material of one of the opposing buckled membranes while energy is not harvested from a transduction material of the other of the opposing buckled membranes.

31. The method of claim 29, wherein the harvesting is from a transduction material in the first buckled membrane and a transduction material in the second buckled membrane.

32. The method of claim 31, wherein the opposing buckled membranes together form a single electrical circuit.

33. The method of claim 29, further comprising;

exerting an excitation force on the contact area, wherein a mass is constrained to move with the contact area and acceleration of the mass imparts the excitation force.

34. The method of claim 29, further comprising:

charging a rechargeable power source with the energy from the harvesting.

35. The method of claim 34, further comprising:

providing an electrical interface between the rechargeable power source and the transduction material.

36. A method for harvesting energy with a microstructure, comprising:

flexing a buckled membrane with a mass, wherein the buckled membrane is attached to the microstructure, the buckled membrane has a transduction material, and the mass is coupled to the transduction material; and

harvesting energy from the transduction material during the flexing.

37. The method of claim 36, further comprising;

summing energy from a plurality of buckled membranes, wherein the plurality of buckled membranes are attached to the microstructure and each buckled membrane of the plurality of buckled membranes contains at least one transduction material.

38. The method of claim 36, wherein the buckled membrane contains more than one transduction material.

39. The method of claim 36, further comprising:

charging a rechargeable power source with the energy from the harvesting.

40. A method for harvesting energy from a microstructure, comprising:

generating an electrical charge in a transduction layer, the transduction layer is part of a first buckled membrane, wherein the generating occurs while the transduction layer flexes; and

harvesting the electrical charge from the transduction layer.

41. The method of claim 40, further comprising:

providing a restoring force from a second buckled membrane, wherein the restoring force acts on the first buckled membrane.

42. The method of claim 40, further comprising:

controlling a stiffness of the transduction layer during the harvesting.

43. The method of claim 42, wherein a harvesting/control circuit is used during the controlling.

44. The method of claim 42, wherein a harvesting/control circuit is used during the harvesting and the controlling.

45. The method of claim 40, wherein a harvesting/control circuit is used during the harvesting.

46. The method of claim 45, wherein the harvesting/control circuit can present at least two different load conditions to the transductive layer.

47. The method of claim 45, wherein a load condition is selected from the group consisting of open, short, in between open and short.