Rotational Type of MEMS Electrostatic Actuator
First Claim
1. A MEMS actuator, comprising:
- a combdrive carried by a substrate, the combdrive having a fixed comb and a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate;
a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb in response to an actuating voltage applied to the combdrive, the comb fingers of the fixed and movable combs being curved in the direction of the movement.
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Accused Products
Abstract
A cantilever type of electrostatic vertical combdrive actuators may generate larger actuator displacement (typically over 70 um) with a relatively small and simple structure. The actuation voltage is lower while the actuation movement is robust without any typical sideway finger snapping phenomena due to a cantilever type of structure. Because of its small form factor, it can form a high fill factor array in applications such as lower power consumption display devices, sensitive electromagnetic radiation detector/detector arrays, etc. The MEMS (Micro-Electro-Mechanical Systems) electrostatic rotational actuators may have wide applications such as in optical shutter, optical chopper, optical switches, optical attenuators, optical tunable filter, RF shunt switch, RF ohmic contact switch, RF MEMS variable capacitors, MEMS display and sensitive electromagnetic radiation detector etc.
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Citations
38 Claims
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1. A MEMS actuator, comprising:
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a combdrive carried by a substrate, the combdrive having a fixed comb and a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate; a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb in response to an actuating voltage applied to the combdrive, the comb fingers of the fixed and movable combs being curved in the direction of the movement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A variable capacitor, comprising:
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a combdrive carried by a substrate, the combdrive having a first electrode comprising a fixed comb and a second electrode comprising a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate; a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb, wherein an actuating voltage moves the movable comb relative to the fixed comb, the comb fingers of the fixed and movable combs being curved in the direction of the movement the combdrive having a capacitance that increases as the overlap of the comb fingers of the fixed comb and the movable comb increases. - View Dependent Claims (30, 31, 32, 33, 34)
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35. An array of MEMS actuators mounted to a substrate, each MEMS actuator comprising:
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a combdrive carried by a substrate, the combdrive having a fixed comb and a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate; a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb in response to an actuating voltage, the comb fingers of the fixed and movable combs being curved in the direction of the movement. - View Dependent Claims (36, 37, 38)
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Specification