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Rotational Type of MEMS Electrostatic Actuator

  • US 20130194649A1
  • Filed: 01/25/2013
  • Published: 08/01/2013
  • Est. Priority Date: 01/26/2012
  • Status: Active Grant
First Claim
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1. A MEMS actuator, comprising:

  • a combdrive carried by a substrate, the combdrive having a fixed comb and a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate;

    a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb in response to an actuating voltage applied to the combdrive, the comb fingers of the fixed and movable combs being curved in the direction of the movement.

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