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Full Color Phase-Only Spatial Light Modulator for Holographic Video Display System

  • US 20130194651A1
  • Filed: 01/30/2013
  • Published: 08/01/2013
  • Est. Priority Date: 01/30/2012
  • Status: Abandoned Application
First Claim
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1. A micromirror device comprising:

  • a substrate;

    a first electrode spaced from and parallel with a surface of the substrate and having a reflective surface directly on the first electrode;

    a plurality of posts on the substrate, within an area occupied by the first electrode in a direction parallel to the substrate, and having distal ends spaced apart from a side of the first electrode facing towards the substrate;

    a respective plurality of flexure arms, each extending from a distal end of a respective one of the posts, between the first electrode and the substrate, within an area occupied by a side portion of the first electrode in a direction parallel to the substrate, and spaced apart from the substrate and from the first electrode, to a free end;

    a respective plurality of anchors, each extending from a respective one of the distal ends of the flexure arms away from the substrate, and joining the first electrode directly to the flexure arms; and

    a second electrode on the substrate facing the first electrode.

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