Full Color Phase-Only Spatial Light Modulator for Holographic Video Display System
First Claim
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1. A micromirror device comprising:
- a substrate;
a first electrode spaced from and parallel with a surface of the substrate and having a reflective surface directly on the first electrode;
a plurality of posts on the substrate, within an area occupied by the first electrode in a direction parallel to the substrate, and having distal ends spaced apart from a side of the first electrode facing towards the substrate;
a respective plurality of flexure arms, each extending from a distal end of a respective one of the posts, between the first electrode and the substrate, within an area occupied by a side portion of the first electrode in a direction parallel to the substrate, and spaced apart from the substrate and from the first electrode, to a free end;
a respective plurality of anchors, each extending from a respective one of the distal ends of the flexure arms away from the substrate, and joining the first electrode directly to the flexure arms; and
a second electrode on the substrate facing the first electrode.
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Abstract
Full-color phase-only spatial light modulators (SLM) are proposed for modulating phase of the light. Proposed SLMs are low-power electrically actuated surface micromachined MEMS device with high reflectivity, high switching speed, high diffraction efficiency, high fill-factor and low surface adhesion to the substrate.
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Citations
20 Claims
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1. A micromirror device comprising:
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a substrate; a first electrode spaced from and parallel with a surface of the substrate and having a reflective surface directly on the first electrode; a plurality of posts on the substrate, within an area occupied by the first electrode in a direction parallel to the substrate, and having distal ends spaced apart from a side of the first electrode facing towards the substrate; a respective plurality of flexure arms, each extending from a distal end of a respective one of the posts, between the first electrode and the substrate, within an area occupied by a side portion of the first electrode in a direction parallel to the substrate, and spaced apart from the substrate and from the first electrode, to a free end; a respective plurality of anchors, each extending from a respective one of the distal ends of the flexure arms away from the substrate, and joining the first electrode directly to the flexure arms; and a second electrode on the substrate facing the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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- 17. A method of fabrication of an array of spatial light modulators, comprising successively forming a plurality of sacrificial layers and a plurality of conducting levels.
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