METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION
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Abstract
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
20 Citations
30 Claims
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1-15. -15. (canceled)
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16. A method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass,
wherein each of these electric trimming voltages (u1, u2, u3, u4) is set as a function of a resonance frequency manipulated variable (ũ -
T, Ũ
T,0), a quadrature manipulated variable (ũ
c, Ũ
C,0) and a resetting variable (ũ
S). - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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T, Ũ
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30. A micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage is applied between each of these trimming electrode elements and the seismic mass, wherein the rotation rate sensor is embodied in such a way that it is suitable for carrying out the method comprising:
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a method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass, wherein each of these electric trimming voltages (u1, u2, u3, u4) is set as a function of a resonance frequency manipulated variable (ũ
T, ũ
T,0), a quadrature manipulated variable (ũ
c, Ũ
C,0) and a resetting variable (ũ
S).
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Specification