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ABERRATION CORRECTION METHOD AND ABERRATION CORRECTION APPARATUS

  • US 20130201448A1
  • Filed: 01/31/2013
  • Published: 08/08/2013
  • Est. Priority Date: 02/08/2012
  • Status: Active Grant
First Claim
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1. An aberration correction method, comprising:

  • a selecting step of selecting a first polarized component of reflected light obtained by irradiating an object to be inspected with measuring light;

    a first aberration measuring step of measuring an aberration of the first polarized component;

    a first aberration correcting step of correcting the aberration of the first polarized component by controlling a first aberration correction unit in accordance with a measured value of the aberration of the first polarized component; and

    a second aberration correcting step of correcting, in a case where a value of the aberration corrected in the first aberration correcting step is smaller than a predetermined value, an aberration of a second polarized component of the reflected light, which is different from the first polarized component, by controlling a second aberration correction unit based on a control for the first aberration correction unit in the case.

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