ABERRATION CORRECTION METHOD AND ABERRATION CORRECTION APPARATUS
First Claim
1. An aberration correction method, comprising:
- a selecting step of selecting a first polarized component of reflected light obtained by irradiating an object to be inspected with measuring light;
a first aberration measuring step of measuring an aberration of the first polarized component;
a first aberration correcting step of correcting the aberration of the first polarized component by controlling a first aberration correction unit in accordance with a measured value of the aberration of the first polarized component; and
a second aberration correcting step of correcting, in a case where a value of the aberration corrected in the first aberration correcting step is smaller than a predetermined value, an aberration of a second polarized component of the reflected light, which is different from the first polarized component, by controlling a second aberration correction unit based on a control for the first aberration correction unit in the case.
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Accused Products
Abstract
To increase the speed of aberration correction, provided is an aberration correction method, including: a step of selecting a first polarized component of reflected light obtained by irradiating an object to be inspected with measuring light; a step of measuring an aberration of the first polarized component; a step of correcting the aberration of the first polarized component by controlling a first aberration correction unit in accordance with a measured value of the aberration of the first polarized component; and a step of correcting, in a case where a value of the aberration corrected in the first aberration correcting step is smaller than a predetermined value, an aberration of a second polarized component of the reflected light, which is different from the first polarized component, by controlling a second aberration correction unit based on a control for the first aberration correction unit in the case.
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Citations
9 Claims
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1. An aberration correction method, comprising:
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a selecting step of selecting a first polarized component of reflected light obtained by irradiating an object to be inspected with measuring light; a first aberration measuring step of measuring an aberration of the first polarized component; a first aberration correcting step of correcting the aberration of the first polarized component by controlling a first aberration correction unit in accordance with a measured value of the aberration of the first polarized component; and a second aberration correcting step of correcting, in a case where a value of the aberration corrected in the first aberration correcting step is smaller than a predetermined value, an aberration of a second polarized component of the reflected light, which is different from the first polarized component, by controlling a second aberration correction unit based on a control for the first aberration correction unit in the case. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An aberration correction apparatus, comprising:
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a selection unit configured to select a first polarized component of reflected light obtained by irradiating an object to be inspected with measuring light; an aberration measurement unit configured to measure an aberration of the first polarized component; a first control unit configured to correct the aberration of the first polarized component by controlling a first aberration correction unit in accordance with a measured value of the aberration of the first polarized component; and a second control unit configured to correct, in a case where a value of the aberration of the first polarized component corrected by the aberration correction unit is smaller than a predetermined value, an aberration of a second polarized component of the reflected light, which is different from the first polarized component, by controlling a second aberration correction unit based on a control for the first aberration correction unit in the case.
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Specification