OPTICAL SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING OPTICAL SEMICONDUCTOR DEVICE
First Claim
1. An optical semiconductor device comprising:
- a waveguide unit which is formed on a semiconductor substrate having a (100) plane and includes a core layer which propagates light;
a spot size converting unit which is formed on the semiconductor substrate, is optically connected to the waveguide unit, and converts diameter of light propagated; and
a pair of terraces which are formed on the semiconductor substrate and opposed to each other while sandwiching the spot size converting unit,wherein interval between opposed units which are opposed to each other while sandwiching the spot size converting unit in the pair of terraces changes, and each of the opposed units includes a part whose orientation tilts to a [0-11] direction with respect to a [011] direction, andposition of an upper end of the spot size converting unit is higher than position of an upper end of the waveguide unit.
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Abstract
An optical semiconductor device includes: a waveguide unit which is formed on a semiconductor substrate including a (100) plane and includes a core layer which propagates light; a spot size converting unit which is formed on the semiconductor substrate, is optically connected to the waveguide unit, and converts diameter of light propagated; and a pair of terraces which are formed on the semiconductor substrate and are opposed to each other while sandwiching the spot size converting unit. Interval between opposed units which are opposed to each other while sandwiching the spot size converting unit in the pair of terraces changes, and each of the opposed units includes a part whose orientation tilts to a [0-11] direction with respect to a [011] direction, and position of an upper end of the spot size converting unit is higher than that of an upper end of the waveguide unit.
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Citations
16 Claims
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1. An optical semiconductor device comprising:
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a waveguide unit which is formed on a semiconductor substrate having a (100) plane and includes a core layer which propagates light; a spot size converting unit which is formed on the semiconductor substrate, is optically connected to the waveguide unit, and converts diameter of light propagated; and a pair of terraces which are formed on the semiconductor substrate and opposed to each other while sandwiching the spot size converting unit, wherein interval between opposed units which are opposed to each other while sandwiching the spot size converting unit in the pair of terraces changes, and each of the opposed units includes a part whose orientation tilts to a [0-11] direction with respect to a [011] direction, and position of an upper end of the spot size converting unit is higher than position of an upper end of the waveguide unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing an optical semiconductor device comprising:
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forming, on a semiconductor substrate having a (100) plane, a mesa unit including a shape extending in one direction and a pair of terraces sandwiching a region extending from the mesa unit along the longitudinal direction of the mesa unit toward a direction opposite to the mesa unit, the mesa unit and the pair of terraces being formed so that opposed units which are opposed to each other while sandwiching the region in the pair of terraces include a part whose orientation tilts in a [0-11] direction with respect to a [011] direction; and forming a first semiconductor layer in the region between the pair of terraces and forming a second semiconductor layer which buries the mesa unit on both sides of at least a part of the mesa unit, position of an upper end of the first semiconductor layer being higher than position of an upper end of the mesa unit. - View Dependent Claims (13, 14, 15, 16)
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Specification