HIGH FREQUENCY SOLID STATE SWITCHING FOR IMPEDANCE MATCHING

• US 20130207738A1
• Filed: 03/14/2013
• Published: 08/15/2013
• Est. Priority Date: 11/03/2011
• Status: Active Grant

• Current Assignee: AES Global Holdings Pte Ltd. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Mason, Christopher C.
• Granted Patent: US 9,065,426 B2
• Time in Patent Office: Days
• US Class Current: 333/32
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H03H 11/28 Impedance matching networks
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance
• CPC Class Codes: H03K 17/56 by the use, as active elements, of semiconductor devices using diodes H03K17/74
• CPC Class Codes: H03K 17/74 by the use, as active elements, of diodes by the use of more than one type of semiconductor device H03K17/567; by the use of tunnel diodes H03K17/58; by the use of negative resistance diodes H03K17/70
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

In accordance with this invention the above and other problems are solved by a switching apparatus and method that uses a switching circuit having a pair of parallel solid-state diodes (e.g., PN or PIN diodes), one of which is connected to a transistor (e.g., power MOSFET or IGBT), to switch a capacitor (or reactance element) in or out of a variable capacitance element (or variable reactance element) of an impedance matching network. Charging a body capacitance of the transistor reverse biases one of the two diodes so as to isolate the transistor from the RF signal enabling a low-cost high capacitance transistor to be used. Multiple such switching circuits and capacitors (or reactance elements) are connected in parallel to provide variable impedance for the purpose of impedance matching.

Claims

1. A circuit of a variable reactance element of an impedance matching network comprising:

a reactance element coupled between a first voltage line and a first node;

a first diode having an anode coupled to the first node and a cathode coupled to a second node;

a second diode having an anode to couple to a second voltage line and a cathode to couple to the first node;

a transistor having a first, second, and control terminals, wherein;

the first terminal is coupled to the second node;

the second terminal is coupled to the second voltage line;

the control terminal is coupled to a controller; and

the reactance element is switched into the variable reactance element when the transistor is on and switched out after the transistor is off.

2. The circuit of claim 1, wherein the transistor is a field effect transistor (FET), a bipolar junction transistor (BJT), or an insulated-gate bipolar transistor (IGBT).

3. The circuit of claim 2, wherein the first diode is a PIN diode, a PN diode, or a Schottky diode.

4. The circuit of claim 3, wherein the second diode is a PIN diode, a PN diode, or a Schottky diode.

5. The circuit of claim 1, wherein, while the transistor is off, a body capacitance of the transistor is charged by current passing through the first diode until a voltage across the transistor reverse biases the first diode.

6. The circuit of claim 1, wherein, while the transistor is off, the first diode conducts until a voltage from the second node to the first node reverse biases the first diode as a result of charging of a body capacitance of the transistor.

7. The circuit of claim 6, wherein, while the transistor is off, the reactance element is substantially switched out of the variable reactance element once the body capacitance of the transistor charges sufficiently to switch off the first diode.

8. The circuit of claim 7, wherein, while the transistor is off, the first diode switches off as a result of charge provided by the RF voltage signal on the first voltage line.

9. The circuit of claim 6, wherein the transistor is isolated from the RF signal on the first voltage line once the first diode switches off.

10. The circuit of claim 1, further comprising a first DC bias applied to the first node.

11. The circuit of claim 10, wherein, while the transistor is off, the first DC bias ensures that the first diode is forward biased while a body capacitance of the transistor is charged.

12. The circuit of claim 10, further comprising a diode that prevents the RF signal from reaching a source of the first DC bias.

13. The circuit of claim 10, wherein the first DC bias reduces distortion of the RF signal when the RF signal is at voltages equal to or below substantially twice a voltage drop of either of the first or second diodes.

14. The circuit of claim 1, further comprising a second DC bias applied to the second node while the transistor is off.

15. The circuit of claim 14, wherein the second DC bias holds the body capacitance of the transistor at a voltage sufficient to reverse bias the first diode while the transistor is off.

16. The circuit of claim 14, wherein the second DC bias reduces distortion of the RF signal caused by leakage current of the transistor.

17. The circuit of claim 14, wherein the second DC bias is also applied to raise a potential of the second node relative to the first node so as to reduce a time to switch off the first diode.

18. The circuit of claim 17, wherein the second DC bias decreases a switching time of the switching circuit.

19. The circuit of claim 1, wherein a susceptance of the body capacitance of the transistor is at least an order of magnitude larger than a magnitude of the susceptance of the reactance element.

20. A switching circuit for a reactance element of an impedance matching network comprising:

a first node coupling the switching circuit to the reactance element;

a second node;

a first diode having an anode coupled to the first node and a cathode coupled to the second node; and

a transistor coupled to the second node and turned off in order to switch the reactance element out of the impedance matching network by a charging of a body capacitance of the transistor leading to a reverse bias voltage across the first diode.

21. The circuit of claim 20, wherein the first diode is a rectifying diode for RF current and current through the reactance element charges the body capacitance of the transistor.

22. The circuit of claim 21, wherein the rectifying diode is a PN or Schottky diode.

23. The circuit of claim 20, wherein the first diode is a PIN diode and a switched DC voltage applied to the second node charges the body capacitance of the transistor.

24. The circuit of claim 20, wherein a susceptance of the capacitance of the transistor is at least an order of magnitude larger than a magnitude of the susceptance of the reactance element.

25. A method of switching a reactance element out of a variable reactance element of an impedance matching network, the method comprising:

turning a switch of the variable reactance element off;

charging a body capacitance of the switch so as to reverse bias a diode having a cathode coupled to a terminal of the switch and an anode coupled to a terminal of the reactance element; and

reducing an RF current through the reactance element as a result of the reverse bias of the diode so as to switch the reactance element out of the variable reactance element.

26. The method of claim 25, wherein the switch is a transistor.

27. The method of claim 25, wherein the diode is a PIN diode.

28. The method of claim 25, further comprising:

turning the switch of the variable reactance element on;

discharging the body capacitance of the switch so as to forward bias the diode; and

increasing the RF current through the reactance element as a result of the forward bias of the diode so as to switch the reactance element into the variable reactance element.