METHOD OF FABRICATION POLYMER WAVEGUIDE
First Claim
1. A method of fabricating a polymer waveguide device, the method comprising:
- providing a substrate having an elector-interconnection region and a waveguide region;
forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region;
bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack;
forming a reflecting-mirror trench in the substrate in the waveguide region, wherein the waveguide region has a reflecting-mirror region and a wave-tunnel region;
forming a reflecting layer at least over the reflecting-mirror region;
forming a patterned bottom cladding layer in the wave-tunnel region; and
forming a patterned core layer and a patterned top cladding layer over the reflecting layer in the reflecting-mirror region and over the bottom cladding layer in the wave-tunnel region.
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Abstract
A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.
41 Citations
20 Claims
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1. A method of fabricating a polymer waveguide device, the method comprising:
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providing a substrate having an elector-interconnection region and a waveguide region; forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region; bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack; forming a reflecting-mirror trench in the substrate in the waveguide region, wherein the waveguide region has a reflecting-mirror region and a wave-tunnel region; forming a reflecting layer at least over the reflecting-mirror region; forming a patterned bottom cladding layer in the wave-tunnel region; and forming a patterned core layer and a patterned top cladding layer over the reflecting layer in the reflecting-mirror region and over the bottom cladding layer in the wave-tunnel region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of fabricating a polymer waveguide device, the method comprising:
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providing a substrate having an elector-interconnection region and a waveguide region; forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region; bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack; forming a 45°
inclined sidewall reflecting-mirror trench in the substrate in the waveguide region, wherein the waveguide region having a reflecting-mirror region and a wave-tunnel region;forming a reflecting layer over the reflecting-mirror region; performing spin-on coating and lithography patterning techniques to form a patterned bottom cladding layer in the wave-tunnel region; performing spin-on coating and lithography patterning processes to form a patterned core layer and a patterned top cladding layer in the waveguide region.
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- 15. The method of claim 15, wherein a vacancy space is formed above the reflecting layer in the reflecting-mirror region.
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17. A polymer waveguide device comprising:
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a substrate having an electro-interconnection region and a waveguide region; a patterned dielectric layer disposed over the substrate in the electro-interconnection region; a patterned redistribution metal layer (RDL) disposed over the dielectric layer; a patterned passivation layer disposed over the patterned RDL; a bond stack over the patterned RDL, through which a wave source connects to the patterned RDL; a reflecting-mirror trench in the substrate, with a 45°
inclined sidewall in a reflecting-mirror region and a flat bottom in a wave-tunnel region;a reflecting layer disposed over the reflecting-mirror region; a patterned bottom cladding layer disposed over the wave-tunnel region by spin-on coating and photolithography techniques; a patterned core layer and a patterned top cladding layer disposed over reflecting-mirror region and the wave-tunnel region by spin-on coating and photolithography techniques. - View Dependent Claims (18, 19, 20)
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Specification