FLOWABLE SILICON-CARBON-NITROGEN LAYERS FOR SEMICONDUCTOR PROCESSING
First Claim
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1. A method of forming a dielectric layer on a semiconductor substrate, the method comprising:
- providing a silicon-containing precursor and an energized nitrogen-containing precursor to a chemical vapor deposition chamber;
reacting the silicon-containing precursor and the energized nitrogen-containing precursor in the chemical vapor deposition chamber to deposit a flowable silicon-carbon-nitrogen material on the substrate; and
treating the flowable silicon-carbon-nitrogen material to form the dielectric layer on the semiconductor substrate.
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Abstract
Methods are described for forming a dielectric layer on a semiconductor substrate. The methods may include providing a silicon-containing precursor and an energized nitrogen-containing precursor to a chemical vapor deposition chamber. The silicon-containing precursor and the energized nitrogen-containing precursor may be reacted in the chemical vapor deposition chamber to deposit a flowable silicon-carbon-nitrogen material on the substrate. The methods may further include treating the flowable silicon-carbon-nitrogen material to form the dielectric layer on the semiconductor substrate.
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Citations
20 Claims
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1. A method of forming a dielectric layer on a semiconductor substrate, the method comprising:
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providing a silicon-containing precursor and an energized nitrogen-containing precursor to a chemical vapor deposition chamber; reacting the silicon-containing precursor and the energized nitrogen-containing precursor in the chemical vapor deposition chamber to deposit a flowable silicon-carbon-nitrogen material on the substrate; and treating the flowable silicon-carbon-nitrogen material to form the dielectric layer on the semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of treating a flowable silicon-carbon-nitrogen layer to reduce a wet etch rate ratio (WERR) of the layer, the method comprising:
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forming the flowable silicon-carbon-nitrogen layer on a substrate by chemical vapor deposition of a silicon-containing precursor and an activated nitrogen precursor; exposing the flowable silicon-carbon-nitrogen layer to plasma, wherein the plasma exposure reduces the number of Si—
H bonds and increases the number of Si—
C bonds in the layer, and wherein the plasma exposure reduces the WERR of the layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification