ELECTRON MICROSCOPE SYSTEM USING AUGMENTED REALITY

• US 20130221218A1
• Filed: 01/23/2013
• Published: 08/29/2013
• Est. Priority Date: 02/27/2012
• Status: Abandoned Application

• Current Assignee: Coxem Co., Ltd.
• Original Assignee: Jun Hee Lee, Yong-Ju Kim
• Inventors: LEE, Jun-Hee, KIM, Yong-Ju
• Application Number:
  US13/748,183
• Publication Number:
  US 20130221218A1
• Time in Patent Office: Days
• US Class Current: 250/310
• CPC Class Codes: H01J 37/261 Details
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Abstract

Provided is an electron microscope system using an augmented reality in that it recognizes a sample identification information by using an observation image generated through an electron microscope and the observation image is linked with the pre-set sample information according to the recognized sample identification information, so that an augmented reality image thereof is provided, thereby even the unskilled man can easily utilize the electron microscope and it can generate excitement about an education thereof.

Claims

1. An electron microscope system using an augmented reality, comprising:

an electron microscope for irradiating an electron beam on a standard sample and obtaining electron signals emitted from a surface of the standard sample or penetrating the standard sample;

an user interface for inputting an operating signal of an user so as to obtain the electron signals through the electron microscope;

a microcomputer for generating an observation image by using the electron signals detected through the electron microscope, generating a sample information for explanation of the sample corresponding to a plurality of points set in the standard sample, and generating an augmented reality image in that the generated sample information is added to the observation image, where the established point is located in the observation image through a moving of a stage thereof; and

a display unit for displaying the augmented reality image generated through the microcomputer on a monitor.

2. An electron microscope system using an augmented reality as claimed in claim 1, wherein the standard sample includes an identification mark and, where the identification mark is recognized in the generated observation image, the microcomputer serves to set a standard coordinate system based on a position information of the identification mark, calculate a moving distance and direction of the stage according to a moving direction and distance fixed through the standard coordinate system, and move the stage according to the calculated moving distance and direction, thereby generating the augmented reality image while automatically searching for the plurality of the points.

3. An electron microscope system using an augmented reality as claimed in claim 2, wherein a plurality of unit samples is formed in the standard sample and the microcomputer serves to calculate a moving order, a moving direction, and a moving distance of the stage according to fixed moving order, moving direction, and moving distance thereof, sequentially moving the stage according to the calculated moving order, moving direction, and moving distance thereof, sequentially search each unit sample, and generate the augmented reality image by connecting the observation image of each unit sample with the pre-set information of each unit sample.

4. An electron microscope system using an augmented reality as claimed in claim 1, wherein the microcomputer serves to move the stage according to an inputted signal during an input of the operation signal of the user and generate the augmented reality image corresponding a moved point, when a coordinate information of the moved point is coincided with the coordinate of the point established in the standard sample and the present magnification is coincided with the pre-set magnification.

5. An electron microscope system using an augmented reality as claimed in claim 1, wherein, where the pre-set image is existed in the observation image, the microcomputer serves to generate an augmented reality image corresponding to the corresponding point by a pre-set magnification thereof.

6. An electron microscope system using an augmented reality as claimed in claim 1, wherein, where an identification code information of the standard sample for observing target is inputted through the user interface, the microcomputer serves to determine the standard sample for observing target based on the identification code information of the standard sample, calculate a moving direction and distance of the stage according to a moving direction and distance fixed through a pre-set standard coordinate of the corresponding standard sample, and move the stage according to the calculated moving distance and direction, thereby generating the augmented reality image while automatically searching for the plurality of the points located in the standard sample.

7. An electron microscope system using an augmented reality as claimed in claim 3, wherein the microcomputer comprises;

a memory unit for storing any one among the sample information, coordinate and magnification information of the points for providing the sample information, and image and magnification information of the points for providing the sample information;

an image recognizing unit for converting the electron signals detected through the electron microscope into image signals to generate the observation image and recognizing the unit sample and positions or images of the plurality of the points established in the unit sample from the generated observation image; and

an image processing unit for connecting the sample information, which is pre-stored in the memory unit, with the observation image generated from the image recognizing unit based on the information recognized by the image recognizing unit to generate the augmented reality image.

8. An electron microscope system using an augmented reality as claimed in claim 4, wherein the microcomputer comprises;

a memory unit for storing any one among the sample information, coordinate and magnification information of the points for providing the sample information, and image and magnification information of the points for providing the sample information;

an image recognizing unit for converting the electron signals detected through the electron microscope into image signals to generate the observation image and recognizing the unit sample and positions or images of the plurality of the points established in the unit sample from the generated observation image; and

an image processing unit for connecting the sample information, which is pre-stored in the memory unit, with the observation image generated from the image recognizing unit based on the information recognized by the image recognizing unit to generate the augmented reality image.

9. An electron microscope system using an augmented reality as claimed in claim 5, wherein the microcomputer comprises;

a memory unit for storing any one among the sample information, coordinate and magnification information of the points for providing the sample information, and image and magnification information of the points for providing the sample information;

an image recognizing unit for converting the electron signals detected through the electron microscope into image signals to generate the observation image and recognizing the unit sample and positions or images of the plurality of the points established in the unit sample from the generated observation image; and

an image processing unit for connecting the sample information, which is pre-stored in the memory unit, with the observation image generated from the image recognizing unit based on the information recognized by the image recognizing unit to generate the augmented reality image.

10. An electron microscope system using an augmented reality as claimed in claim 6, wherein the microcomputer comprises;

a memory unit for storing any one among the sample information, coordinate and magnification information of the points for providing the sample information, and image and magnification information of the points for providing the sample information;

an image recognizing unit for converting the electron signals detected through the electron microscope into image signals to generate the observation image and recognizing the unit sample and positions or images of the plurality of the points established in the unit sample from the generated observation image; and

an image processing unit for connecting the sample information, which is pre-stored in the memory unit, with the observation image generated from the image recognizing unit based on the information recognized by the image recognizing unit to generate the augmented reality image.