Feedback Control And Coherency Of Multiple Power Supplies In Radio Frequency Power Delivery Systems For Pulsed Mode Schemes in Thin Film Processing
First Claim
1. A radio frequency (RF) control system comprising:
- a power amplifier that outputs a RF signal to a load;
a sensor monitoring the RF signal and generating a sensor signal based on the RF signal;
an energy detection circuit determining an energy of the RF signal in accordance with the sensor signal; and
a power amplifier energy adjustment circuit generating a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit.
9 Assignments
0 Petitions
Accused Products
Abstract
A RF power supply system for delivering periodic RF power to a load. A power amplifier outputs a RF signal to the load. A sensor measures the RF signal provided to the load and outputs signals that vary in accordance with the RF signal. A first feedback loop enables control the RF signal based upon power determined in accordance with output from the sensor. A second feedback loop enables control the RF signal based upon energy measured in accordance with signals output from the sensor. Energy amplitude and duration provide control values for varying the RF signal. The control system and techniques are applicable to both pulsed RF power supplies and in various instances to continuous wave power supplies.
64 Citations
40 Claims
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1. A radio frequency (RF) control system comprising:
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a power amplifier that outputs a RF signal to a load; a sensor monitoring the RF signal and generating a sensor signal based on the RF signal; an energy detection circuit determining an energy of the RF signal in accordance with the sensor signal; and a power amplifier energy adjustment circuit generating a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A radio frequency (RF) control system comprising:
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a power amplifier that outputs a RF signal to a load; a sensor monitoring the RF signal and generating a sensor signal based on the RF signal; an energy detection circuit determining an energy of the RF signal in accordance with the sensor signal; a power detection circuit determining a power of the RF signal in accordance with the sensor signal; and a power amplifier energy adjustment circuit generating a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit and the power determined by the power detection circuit, wherein the RF signal includes a first signal and a first modulation signal modulating the first signal and wherein the energy detection circuit determines the energy of the first modulation signal to determine the energy of the RF signal. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A radio frequency (RF) control system comprising:
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a plurality of power amplifiers that outputs a respective RF signal to a load, each power amplifier including; a power amplifier that outputs a RF signal to a load; a sensor monitoring the RF signal and generating a sensor signal based on the RF signal; an energy detection circuit determining an energy of the RF signal in accordance with the sensor signal; and a power amplifier energy adjustment circuit generating a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit; a RF delivery coordination module, the RF delivery coordination module controlling the phase between the respective RF power supplies. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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31. A radio frequency (RF) control system comprising:
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a plurality of power amplifiers that outputs a respective pulsed RF signal to a load, each power amplifier including; a power amplifier that outputs a RF signal to a load; a sensor monitoring the RF signal and generating a sensor signal based on the RF signal; an energy detection circuit determining an energy of the RF signal in accordance with the sensor signal; and a power amplifier energy adjustment circuit generating a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit; a RF delivery coordination module, the RF delivery coordination module synchronizing the respective RF power supplies. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification