PARTIAL LASER ABLATION SENSOR PROCESS
First Claim
1. A method comprising:
- providing a touch sensor structure comprising;
a substrate;
a first layer disposed on a surface of the substrate, the first layer having an associated first ablation fluence value; and
a second layer disposed on a surface of the first layer opposite the substrate, the second layer having an associated second ablation fluence value that is less than the first ablation fluence value;
ablating the second layer using a laser emitting energy having a fluence value that is greater than or equal to the second ablation fluence value and less than the first ablation fluence value;
removing at least a portion of the first layer exposed after ablating the second layer; and
removing at least a portion of the second layer after removing the portion of the first layer.
1 Assignment
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Accused Products
Abstract
Processes for fabricating compact touch sensors for touch sensitive devices are disclosed. A process can include providing a touch sensor structure having a substrate, a first layer disposed on the substrate, and a second layer disposed on the first layer. The second layer can have an ablation fluence value that is lower than an ablation fluence value of the first layer. The process can include patterning the second layer with a laser emitting energy having a fluence value greater than or equal to the ablation fluence value of the second layer and less than the ablation fluence value of the first layer. The process can further include etching at least a portion of the first layer that was exposed during the patterning of the second layer. At least a portion of the second layer can then be removed by etching or laser ablation.
42 Citations
25 Claims
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1. A method comprising:
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providing a touch sensor structure comprising; a substrate; a first layer disposed on a surface of the substrate, the first layer having an associated first ablation fluence value; and a second layer disposed on a surface of the first layer opposite the substrate, the second layer having an associated second ablation fluence value that is less than the first ablation fluence value; ablating the second layer using a laser emitting energy having a fluence value that is greater than or equal to the second ablation fluence value and less than the first ablation fluence value; removing at least a portion of the first layer exposed after ablating the second layer; and removing at least a portion of the second layer after removing the portion of the first layer. - View Dependent Claims (2, 3, 4, 5)
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6. A method comprising:
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depositing a first layer onto a substrate, the first layer having an associated first ablation fluence value; depositing a second layer on the first layer, the second layer having an associated second ablation fluence value that is less than the first ablation fluence value; patterning the second layer using a laser emitting energy having a fluence value greater than or equal to the second ablation fluence value and less than the first ablation fluence value; removing at least a portion of the first layer exposed after patterning the second layer; and removing at least a portion of the second layer after removing the portion of the first layer. - View Dependent Claims (7, 8, 9, 10)
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11. A method comprising:
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providing a touch sensor structure comprising; a substrate; a first layer disposed on a surface of the substrate, the first layer having an associated first ablation fluence value; and a second layer disposed on a surface of the first layer opposite the substrate, the second layer having an associated second ablation fluence value that is less than the first ablation fluence value; ablating the second layer using a laser emitting energy having a fluence value that is greater than or equal to the second ablation fluence value and less than the first ablation fluence value; and removing at least a portion of the first layer exposed after ablating the second layer. - View Dependent Claims (12, 13, 14, 15)
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16. A method comprising:
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depositing a first layer onto a surface of a substrate, the first layer having an associated first ablation fluence value; depositing a second layer on a surface of the first layer opposite the substrate, the second layer having an associated second ablation fluence value that is less than the first ablation fluence value; patterning the second layer using a laser emitting energy having a fluence value greater than or equal to the second ablation fluence value and less than the first ablation fluence value; and removing at least a portion of the first layer exposed after patterning the second layer. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A touch sensitive device comprising:
a plurality of conductive traces formed by ablating a first layer according to a first fluence value so as to form a pattern for the plurality of conductive traces and etching a second layer to match the pattern, the etched second layer being the conductive traces. - View Dependent Claims (24, 25)
Specification