STRUCTURE AND METHOD FOR A FISHBONE DIFFERENTIAL CAPACITOR
First Claim
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1. An integrated circuit, comprising:
- a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis; and
a capacitor structure disposed on the substrate, wherein the capacitor structure includes;
a first conductive component, anda second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component, wherein the first, second, and third conductive components are separated from each other by respective dielectric material.
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Abstract
The present disclosure provides an integrated circuit. The integrated circuit includes a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis; and a capacitor structure disposed on the substrate. The capacitor structure includes a first conductive component; a second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component. The first, second and third conductive components are separated from each other by respective dielectric material.
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Citations
20 Claims
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1. An integrated circuit, comprising:
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a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis; and a capacitor structure disposed on the substrate, wherein the capacitor structure includes; a first conductive component, and a second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component, wherein the first, second, and third conductive components are separated from each other by respective dielectric material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A semiconductor structure, comprising:
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a substrate having a surface that is defined by a first axis and a second axis perpendicular to the first axis, wherein the substrate includes a first region, a second region, and a third region, wherein the first region is interposed between the second and third regions; and a differential capacitor disposed on the substrate, wherein the differential capacitor includes; a first conductive component having a first stem feature that is disposed in the first region, a second conductive component disposed in the second region; and a third conductive component disposed in the third region, wherein the second and third conductive components are symmetrically designed and symmetrically configured on opposite sides of the first conductive component. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A method of fabricating an integrated circuit, comprising:
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providing a substrate having a surface that is defined by a first axis and a second axis that is perpendicular to the first axis; and forming an interconnect structure over the surface of the substrate, the interconnect structure having layers of conductive lines and levels of conductive vias interconnecting the layers of conductive lines, wherein the forming of the interconnect structure includes forming a capacitor structure disposed on the substrate, wherein the capacitor structure includes; a first conductive component, and a second conductive component and a third conductive component symmetrically configured on opposite sides of the first conductive component, wherein the first, second, and third conductive components are separated from each other by respective dielectric material.
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Specification