ELECTRON MICROSCOPE, ELECTRON-MICROSCOPE IMAGE-RECONSTRUCTION SYSTEM AND ELECTRON-MICROSCOPE IMAGE-RECONSTRUCTION METHOD

• US 20130234024A1
• Filed: 10/14/2011
• Published: 09/12/2013
• Est. Priority Date: 11/30/2010
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Kubo, Takashi, Kobayashi, Hiroyuki
• Granted Patent: US 8,704,177 B2
• Time in Patent Office: Days
• US Class Current: 250/307
• CPC Class Codes: H01J 2237/226 Image reconstruction
• CPC Class Codes: H01J 2237/2802 Transmission microscopes
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube image data processing or generation, in general G06T
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes

Abstract

There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in contrast, contamination of a sample, and restrictions imposed on a sample for use, occurring due to use of markings

A plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; are acquired, misregistration is corrected by a rotation step-angle, a rotated object under observation is tilted in angle-steps, differing from each other, to pick up images thereof, two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups are created, and one reconstruction image is created by superimposing one of the two reconstruction images on the other.

Claims

1. An electron microscope provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope comprising:

a first storage means for tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit;

a rotation means for correcting misregistration of the object under observation by a rotation step-angle to thereby rotate the object under observation up to a set rotation angle;

a second storage means for tilting the object under observation rotated by the rotation means, at angle-steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and

an operation means for creating third, and fourth reconstruction images, obtained by correcting misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other.

2. The electron microscope according to claim 1, wherein the operation unit executes control such that the rotation means sets a tilt-angle of a sample to the vicinity of 0 degree using the tilting unit, a first reference image is photographed using the first image detection unit to thereby create a target reference image obtained by rotating the first reference image by a target rotation-angle, a second reference image is photographed using the second image detection unit to thereby create a step-reference image obtained by rotating the sample by a step-angle, the sample is rotated by a step-angle using the rotation unit to photograph a step image using the second image detection unit, misregistration amounts are calculated using the step-reference image, and the step image, the object under observation is transferred by the misregistration amounts using the transfer unit to correct the misregistration, creation of the step-reference image, photographing of the step image, calculation of the misregistration amount, and the correction of the misregistration are repeated until the target rotation-angle is reached, a target image is photographed by the first image detection unit, misregistration amounts are calculated using the target reference image, and the target image, and the object under observation is transferred by the misregistration amounts using the transfer unit to thereby correct the misregistration.

3. The electron microscope according to claim 1, wherein the operation means performs an operation comprising the steps of:

calculating parallel-translation misregistration amounts of the second reconstruction image, against the first reconstruction image, using three-dimensional cross-correlation, to thereby create a parallel-translation misregistration-correction image obtained by transferring the second reconstruction image by the parallel-translation misregistration amounts;

creating a first addition image, and a second addition image, obtained by adding a density value of every pixel of the first reconstruction image, and the parallel-translation misregistration-correction image, in a z-direction, respectively, to thereby derive a common line from the first addition image, and the second addition image, respectively;

calculating respective rotation angles for causing the common lines in the respective addition images to match each other, to create a first common-line correction image, and a second common-line correction image, obtained by rotating the first reconstruction image, and the parallel-translation misregistration-correction image by the respective rotation angles so as to cause the respective common lines to match each other;

creating a first sliced image by extracting an optional plane from a plane perpendicular to the common line from the first common-line correction image, and a second sliced image by extracting a plane at the same coordinates as those of the first sliced image from the plane perpendicular to the common line from the second common-line correction image; and

calculating a rotational-transfer misregistration amount of the second sliced image, against the first sliced image, and creating a rotational-transfer misregistration-correction image obtained by rotating the second common-line correction image by the rotational-transfer misregistration amount with the use of the common line as the rotation axis, thereby outputting the first common-line correction image as the third reconstruction image, and the rotational-transfer misregistration-correction image as the fourth reconstruction image.

4. The electron microscope according to claim 3, wherein the operation means performs an operation comprising the steps of:

calculating parallel-translation misregistration amounts of the fourth reconstruction image, against the third reconstruction image, using three-dimensional cross-correlation, after the step of creating the rotational-transfer misregistration-correction image;

creating a parallel-translation misregistration-correction image obtained by transferring the fourth reconstruction image by the parallel-translation misregistration amounts;

creating a feature-extraction image obtained by extracting a feature of the third reconstruction image;

dividing the feature-extraction image into one region or a plurality of regions;

dividing the parallel-translation misregistration-correction image into one region or a plurality of regions;

calculating respective integrated values of density values in a template region in the respective regions of the feature-extraction image, while transferring the template region to thereby search the template region where the respective integrated values are at the maximum;

storing the respective template regions of the third reconstruction image as template images in the respective regions, and assuming the respective regions of the parallel-translation misregistration-correction image, corresponding to the respective template images, as respective search-images;

calculating regions having highest similarity from the respective search-images, and the respective template images, corresponding to each other;

calculating a rotational-transfer misregistration amount of the parallel-translation misregistration-correction image, against the third reconstruction image, from coordinates of the respective template images, and coordinates of the respective regions having highest similarity; and

creating a rotational transfer misregistration correction image obtained by rotating the parallel-translation misregistration-correction image by the rotational-transfer misregistration amount, thereby outputting the rotational-transfer misregistration-correction image as the third reconstruction image.

5. The electron microscope according to claim 4, wherein the operation means works out the feature amount by image differentiation.

6. The electron microscope according to claim 4, wherein the operation means works out the feature amount by image binarization.

7. The electron microscope according to claim 4, wherein the operation means works out the feature amount using the fourth reconstruction image.

8. An electron-microscope image-reconstruction system using a measuring device provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope image-reconstruction system comprising:

a first storage means for tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit;

a rotation means for correcting misregistration of the object under observation by a rotation step-angle to rotate the object under observation up to a set rotation angle;

a second storage means for tilting the object under observation rotated by the rotation means, at angle steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and

an operation means for creating third, and fourth reconstruction images, obtained by correcting respective misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other.

9. The electron-microscope image-reconstruction system according to claim 8, wherein the operation unit executes control such that the rotation means sets a tilt-angle of a sample to the vicinity of 0 degree using the tilting unit, a first reference image is photographed using the first image detection unit to thereby create a target reference image obtained by rotating the first reference image by a target rotation-angle, a second reference image is photographed using the second image detection unit to thereby create a step-reference image obtained by rotating the sample by a step-angle, the sample is rotated by a step-angle using the rotation unit to photograph a step image using the second image detection unit, a misregistration amount is calculated using the step-reference image, and the step image, the object under observation is transferred by the misregistration amount using the transfer unit to correct the misregistration, creation of the step-reference image, and photographing of the step image, calculation of the misregistration amount, and the correction of the misregistration are repeated until the target rotation-angle is reached, a target image is photographed by the first image detection unit, a misregistration amount is calculated using the target reference image, and the target image, and the object under observation is transferred by the misregistration amount using the transfer unit to thereby correct the misregistration.

10. The electron-microscope image-reconstruction system according to claim 8, wherein the operation means performs an operation comprising the steps of:

calculating parallel-translation misregistration amounts of the second reconstruction image, against the first reconstruction image, using three-dimensional cross-correlation, to thereby create a parallel-translation misregistration-correction image obtained by transferring the second reconstruction image by the parallel-translation misregistration amounts;

creating a first addition image, and a second addition image, obtained by adding a density value of every pixel of the first reconstruction image, and the parallel-translation misregistration-correction image, in a z-direction, respectively, to thereby derive a common line from the first addition image, and the second addition image, respectively;

calculating respective rotation angles for causing the common lines in the respective addition images to match each other, to create a first common-line correction image, and a second common-line correction image, obtained by rotating the first reconstruction image, and the parallel-translation misregistration-correction image by the respective rotation angles so as to cause the respective common lines to match each other;

creating a first sliced image by extracting an optional plane from a plane perpendicular to the common line from the first common-line correction image, and a second sliced image by extracting a plane at the same coordinates as those of the first sliced image from the plane perpendicular to the common line from the second common-line correction image;

calculating a rotational-transfer misregistration amount of the second sliced image, against the first sliced image;

creating a rotational-transfer misregistration-correction image obtained by rotating the second common-line correction image by the rotational-transfer misregistration amount with the use of the common line as the rotation axis; and

outputting the first common-line correction image as the third reconstruction image, and the rotational-transfer misregistration-correction image as the fourth reconstruction image.

11. The electron-microscope image-reconstruction system according to claim 10, wherein the operation means performs an operation comprising the steps of:

calculating parallel-translation misregistration amounts of the fourth reconstruction image, against the third reconstruction image, using three-dimensional cross-correlation, after the step of creating the rotational-transfer misregistration-correction image;

creating a parallel-translation misregistration-correction image obtained by transferring the fourth reconstruction image by the parallel-translation misregistration amount;

creating a feature-extraction image obtained by extracting a feature of the third reconstruction image;

dividing the feature-extraction image into one region or a plurality of regions, and dividing the parallel-translation misregistration-correction image into one region or a plurality of regions;

calculating respective integrated values A_i, A2_i, A3_i, and A4_i of density values in a template region while transferring the template region in the respective regions of the feature-extraction image to thereby search the template regions, where the integrated values A_i, A2_i, A3_i, and A4_i in the respective regions are at the maximum;

storing the respective template regions of the third reconstruction image as template images in the respective regions, and assuming the respective regions of the parallel-translation misregistration-correction image, corresponding to the respective template images, as respective search-images;

calculating regions having highest similarity from the respective search-images, and the respective template images, corresponding to each other;

calculating the rotational-transfer misregistration amounts of the parallel-translation misregistration-correction image against the third reconstruction image from coordinates of the respective template images and coordinates of the respective regions having highest similarity; and

creating a rotational-transfer misregistration-correction image obtained by rotating the parallel-translation misregistration-correction image by the rotational-transfer misregistration amounts, thereby outputting the rotational-transfer misregistration-correction image as the third reconstruction image.

12. The electron-microscope image-reconstruction system according to claim 11, wherein the operation means works out the feature amount by image differentiation.

13. The electron-microscope image-reconstruction system according to claim 11, wherein the operation means works out the feature amount by image binarization.

14. The electron-microscope image-reconstruction system according to claim 11, wherein the operation means works out the feature amount using the fourth reconstruction image.

15. An electron-microscope image-reconstruction method using a measuring device provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope image-reconstruction method comprising the steps of:

tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit;

correcting misregistration of the object under observation by a rotation step-angle to rotate the object under observation up to a set rotation angle;

tilting the object under observation rotated at angle steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and

creating third, and fourth reconstruction images, obtained by correcting respective misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and

creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other.

16. The electron-microscope image-reconstruction method according to claim 15, wherein the rotation step comprises the step of:

setting a tilt-angle of a sample to the vicinity of 0 degree using the tilting unit;

photographing a first reference image using the first image detection unit to thereby create a target reference image obtained by rotating the first reference image by a target rotation-angle;

photographing a second reference image using the second image detection unit to thereby create a step-reference image obtained by rotating the sample by a step-angle;

rotating the sample by a step-angle using the rotation unit to photograph a step image using the second image detection unit;

calculating a misregistration amount using the step-reference image, and the step image;

transferring the object under observation by the misregistration amount using the transfer unit to correct the misregistration;

repeating creation of the step-reference image, photographing of the step image, calculation of the misregistration amount, and the correction of the misregistration until the target rotation-angle is reached,

photographing a target image by the first image detection unit to calculate misregistration amounts using the target reference image, and the target image; and

transferring the object under observation by the misregistration amounts using the transfer unit to thereby correct the misregistration.

17. The electron-microscope image-reconstruction method according to claim 15, wherein the step of creating the third, and fourth reconstruction images, comprises the steps of:

calculating parallel-translation misregistration amounts of the second reconstruction image, against the first reconstruction image, using three-dimensional cross-correlation, to thereby create a parallel-translation misregistration-correction image obtained by transferring the second reconstruction image by the parallel-translation misregistration amounts;

creating a first addition image, and a second addition image, obtained by adding a density value of every pixel of the first reconstruction image, and the parallel-translation misregistration-correction image, in a z-direction, respectively, to thereby derive a common line from the first addition image, and the second addition image, respectively;

calculating respective rotation angles for causing the common lines in the respective addition images to match each other, to create a first common-line correction image and a second common-line correction image, obtained by rotating the first reconstruction image, and the parallel-translation misregistration-correction image by the respective rotation angles, respectively, so as to cause the respective common lines to match each other;

creating a first sliced image by extracting an optional plane from a plane perpendicular to the common line from the first common-line correction image, and a second sliced image by extracting a plane at the same coordinates as those of the first sliced image from the plane perpendicular to the common line from the second common-line correction image;

calculating a rotational-transfer misregistration amount of the second sliced image, against the first sliced image;

creating a rotational-transfer misregistration-correction image obtained by rotating the second common-line correction image by the rotational-transfer misregistration amount with the use of the common line as the rotation axis; and

outputting the first common-line correction image as the third reconstruction image, and the rotational-transfer misregistration-correction image as the fourth reconstruction image.

18. The electron microscope image-reconstruction method according to claim 17, comprising the steps of:

calculating parallel-translation misregistration amounts of the fourth reconstruction image, against the third reconstruction image, using three-dimensional cross-correlation, after the step of creating the rotational-transfer misregistration-correction image;

creating a parallel-translation misregistration-correction image obtained by transferring the fourth reconstruction image by the parallel-translation misregistration amounts;

creating a feature-extraction image obtained by extracting a feature of the third reconstruction image;

dividing the feature-extraction image into one region or a plurality of regions;

dividing the parallel-translation misregistration-correction image into one region or a plurality of regions;

calculating respective integrated values of density values in a template region in the respective regions of the feature-extraction image, while transferring the template region to thereby search the template region where the respective integrated values are at the maximum;

storing the respective template regions of the third reconstruction image as template images in the respective regions, and assuming the respective regions of the parallel-translation misregistration-correction image, corresponding to the respective template images, as respective search-images;

calculating regions having highest similarity from the respective search-images, and the respective template images, corresponding to each other;

calculating a rotational-transfer misregistration amount of the parallel-translation misregistration-correction image, against the third reconstruction image, from coordinates of the respective template images, and coordinates of the respective regions having highest similarity; and

creating a rotational transfer misregistration correction image obtained by rotating the parallel translation misregistration correction image by the rotational transfer misregistration amount, thereby outputting the rotational transfer misregistration correction image as the third reconstruction image.

19. The electron-microscope image-reconstruction method according to claim 18, wherein a feature-amount calculation step is executed by image differentiation.

20. The electron-microscope image-reconstruction method according to claim 18, wherein a feature-amount calculation step is executed by image binarization.

21. The electron-microscope image-reconstruction method according to claim 18, wherein a feature-amount calculation step is executed using the fourth reconstruction image.

22. An electron-microscope image-reconstruction method comprising the steps of:

acquiring a plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other;

correcting misregistration by a rotation step-angle;

tilting a rotated object under observation in angle-steps, differing from each other, to pick up images thereof;

creating two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups, and

creating one reconstruction image by superimposing one of the two reconstruction images on the other.