ANGULAR VELOCITY SENSOR
First Claim
1. An angular velocity sensor comprising:
- a vibrator located in x-y plane specified by x direction and y direction that are orthogonal to each other;
a substrate that is separated away from the vibrator in z direction perpendicular to the x-y plane;
an anchor device extended from the substrate to the x-y plane in which the vibrator is located;
a linkage beam device that links the anchor device with the vibrator, the linkage beam being able to twist about the y direction;
an excitation portion that vibrates the vibrator along the z direction; and
a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator,whereinthe vibrator includes a linkage region that is linked with the linkage beam device, the linkage region becoming a wave node when the vibrator vibrates along the z direction.
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Accused Products
Abstract
An angular velocity sensor includes a vibrator located along x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator along z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device to the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator. The vibrator includes a linkage region to link with the linkage beam device, and the linkage region becomes a wave node when the vibrator vibrates along the z direction.
20 Citations
12 Claims
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1. An angular velocity sensor comprising:
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a vibrator located in x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator in z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device with the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator, wherein the vibrator includes a linkage region that is linked with the linkage beam device, the linkage region becoming a wave node when the vibrator vibrates along the z direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification