MICROELECTROMECHANICAL Z-AXIS DETECTION STRUCTURE WITH LOW THERMAL DRIFTS
First Claim
1. A MEMS structure, comprising:
- a substrate having a top surface;
a first fixed-electrode arrangement on the top surface of the substrate;
a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement by a separation distance;
connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance;
a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements; and
an anchoring arrangement configured to couple said coupling mass to said substrate, the anchoring arrangement being coupled to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element.
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Abstract
A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.
11 Citations
25 Claims
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1. A MEMS structure, comprising:
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a substrate having a top surface; a first fixed-electrode arrangement on the top surface of the substrate; a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement by a separation distance; connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance; a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements; and an anchoring arrangement configured to couple said coupling mass to said substrate, the anchoring arrangement being coupled to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 11, 12, 13, 14, 15, 24)
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9-10. -10. (canceled)
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16. A microelectromechanical device, comprising:
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an interface circuit; and a MEMS structure electrically coupled to the read-interface circuit and including; a substrate having a top surface; a first fixed-electrode arrangement on the top surface of the substrate; a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement at a separation distance; connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance; a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements; and an anchoring arrangement configured to couple said coupling mass to said substrate, the anchoring arrangement being coupled to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element. - View Dependent Claims (17, 18, 25)
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19. An electronic device, comprising:
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a microprocessor unit; and a microelectromechanical device that includes; an interface circuit electrically coupled to the microprocessor unit; and a MEMS structure electrically coupled to the interface circuit and including; a substrate having a top surface; a first fixed-electrode arrangement on the top surface of the substrate; a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement at a separation distance; connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance; a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements; and an anchoring arrangement configured to anchor said coupling mass to said substrate, the anchoring arrangement being connected to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element. - View Dependent Claims (20, 21, 22, 23)
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Specification