DEVICE FOR DETECTING AN ELECTROMAGNETIC RADIATION
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Abstract
The electromagnetic radiation detection device includes, on a same substrate:
- at least one active detector of the electromagnetic radiation provided with a first element sensitive to said radiation,
- at least one reference detector including a second element sensitive to said electromagnetic radiation, and
- a lid provided with first reflective means reflecting the incident electromagnetic radiation, said lid covering without contact the second sensitive element and defining with the substrate a cavity having the reference detector housed therein. The lid is designed to improve the sensitivity of the detection device.
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Citations
37 Claims
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1-19. -19. (canceled)
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20. An electromagnetic radiation detection device comprising, on a same substrate:
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an active detector of the electromagnetic radiation provided with a first element sensitive to said electromagnetic radiation, a reference detector comprising a second element sensitive to said electromagnetic radiation, said second sensitive element having a first main surface facing an incident electromagnetic radiation and an opposite second main surface facing the substrate, a reflector comprising reflecting sidewalls supporting a reflecting cover, said reflecting cover and said reflecting sidewalls being configured for reflecting the incident electromagnetic radiation, and covering without contact the reference detector wherein said active detector is outside of the reflector, wherein the reflecting cover and the second sensitive element are separated by an empty space and by a distance ranging between 0.5 μ
m and 5 μ
m. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification