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AUTOMATIC PARTICLE MEASUREMENT CART AND AUTOMATIC PARTICLE MEASUREMENT SYSTEM FOR CLEAN ROOM AND MEASUREMENT METHOD THEREOF

  • US 20130246004A1
  • Filed: 04/06/2012
  • Published: 09/19/2013
  • Est. Priority Date: 03/15/2012
  • Status: Abandoned Application
First Claim
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1. An automatic particle measurement cart for clean room, characterized by comprising:

  • an automatic piloting device, which guides the cart to move along a pre-set path, the automatic piloting device comprising a reading head, the reading head functioning to recognize a pre-set detective path and identify a plurality of pre-set measurement points, the cart being movable along the pre-set detective path;

    a measurement device, which measures particles at the measurement points; and

    a data processing device, which transmits the measured particle data to the data processing device, the data processing device making output of data according to a pre-set rule.

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