AUTOMATIC PARTICLE MEASUREMENT CART AND AUTOMATIC PARTICLE MEASUREMENT SYSTEM FOR CLEAN ROOM AND MEASUREMENT METHOD THEREOF
First Claim
1. An automatic particle measurement cart for clean room, characterized by comprising:
- an automatic piloting device, which guides the cart to move along a pre-set path, the automatic piloting device comprising a reading head, the reading head functioning to recognize a pre-set detective path and identify a plurality of pre-set measurement points, the cart being movable along the pre-set detective path;
a measurement device, which measures particles at the measurement points; and
a data processing device, which transmits the measured particle data to the data processing device, the data processing device making output of data according to a pre-set rule.
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Abstract
The present invention discloses an automatic particle measurement cart and an automatic particle measurement system for clean room and a measurement method thereof. The automatic measurement cart includes an automatic piloting device, which guides the cart to move along a pre-set path. The automatic piloting device includes a reading head, which recognizes the pres-set detective path and detects multiple pre-set measurement points. The cart moves along the detective path. A measurement device measures particles at the measurement points. A data processing device receives particle data measured by the measurement device and provides output according to a pre-set rule. With the above manner, the present invention can automatically measure clean room particles at a given site so as to reduce human labor involved and improve the preciseness of measurement result.
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Citations
13 Claims
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1. An automatic particle measurement cart for clean room, characterized by comprising:
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an automatic piloting device, which guides the cart to move along a pre-set path, the automatic piloting device comprising a reading head, the reading head functioning to recognize a pre-set detective path and identify a plurality of pre-set measurement points, the cart being movable along the pre-set detective path; a measurement device, which measures particles at the measurement points; and a data processing device, which transmits the measured particle data to the data processing device, the data processing device making output of data according to a pre-set rule. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for automatic measurement of clean room particle, characterized by comprising the following steps:
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storing step;
in which data of measurement point are stored in advance, the data of measurement point comprising one or more of the following data;
time interval for carrying out a next automatic measurement operation after completion of a previous measurement operation, time interval for actively carrying out a next automatic measurement operation after identification of abnormal data, positional relationship of spaced measurement points, and acceptable range of particle number;moving step;
in which guidance through electromagnetic sensing, laser sensing, magnet-gyro sensing, or vision-guided sensing is employed to detect and recognize pre-set detective path and measurement points and movement is made along the detective path;measuring step;
in which when a measurement point is detected and recognized, the movement is suspended to carry out measurement of particle at the measurement point, or when movement is made to reach a pre-determined measurement point, the movement is suspended to carry out measurement of particles of the measurement point;transmitting step;
in which multiple particle data measured by the measurement device are transmitted; andprocessing step;
in which the multiple particle data are received and processed. - View Dependent Claims (11, 12, 13)
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Specification