HIGH-PERFORMANCE BENDING ACCELEROMETER
First Claim
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1. An accelerometer comprising:
- an elastic substrate beam having a first end and a second end and having upper and lower surfaces;
supports to support the first and second ends of the substrate beam;
sensing elements comprising piezoelectric material bonded onto the upper, lower, or both the upper and lower surfaces of the substrate beam; and
force applying elements for applying forces at two locations between the first and second ends,whereby the substrate beam and the piezoelectric materials operate in a four-point bending configuration.
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Abstract
An accelerometer comprises an elastic substrate beam having a first end and a second end and having upper and lower surfaces; supports to support the first and second ends of the substrate beam; sensing elements comprising piezoelectric material bonded onto the upper, lower or both the upper and lower surfaces of the substrate beam; and force applying elements for applying forces at two locations between the first and second ends. The substrate beam and the piezoelectric materials operate in a four-point bending configuration. Optionally the first and second ends of the substrate beam are formed by bending the substrate beam to reduce the physical dimensions of the device.
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Citations
25 Claims
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1. An accelerometer comprising:
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an elastic substrate beam having a first end and a second end and having upper and lower surfaces; supports to support the first and second ends of the substrate beam; sensing elements comprising piezoelectric material bonded onto the upper, lower, or both the upper and lower surfaces of the substrate beam; and force applying elements for applying forces at two locations between the first and second ends, whereby the substrate beam and the piezoelectric materials operate in a four-point bending configuration. - View Dependent Claims (2, 6, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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3-5. -5. (canceled)
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7-8. -8. (canceled)
Specification