GYRO SENSOR AND ELECTRONIC APPARATUS

• US 20130255378A1
• Filed: 04/01/2013
• Published: 10/03/2013
• Est. Priority Date: 04/02/2012
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: KANEMOTO, Kei
• Granted Patent: US 9,243,908 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings

Abstract

A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

Claims

1. A gyro sensor comprising:

a vibrating body;

a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body;

a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body;

a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body;

a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction;

a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and

a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

2. The gyro sensor according to claim 1, wherein

the first drive wiring has a portion that extends, on the one side of the vibrating body, toward the side opposite to the first direction side.

3. The gyro sensor according to claim 1, wherein

the first drive wiring and the second drive wiring are connected to each other.

4. The gyro sensor according to claim 2, wherein

the first drive wiring and the second drive wiring are connected to each other.

5. The gyro sensor according to claim 1, wherein

the drive wiring and the detection wiring do not cross each other.

6. The gyro sensor according to claim 2, wherein

the drive wiring and the detection wiring do not cross each other.

7. The gyro sensor according to claim 3, wherein

the drive wiring and the detection wiring do not cross each other.

8. The gyro sensor according to claim 4, wherein

the drive wiring and the detection wiring do not cross each other.

9. The gyro sensor according to claim 1, further comprising a movable drive electrode that extends from the vibrating body, wherein

the first fixed drive electrode and the second fixed drive electrode are disposed to face the movable drive electrode.

10. The gyro sensor according to claim 1, further comprising:

a displacement portion that is connected to the vibrating body via a spring portion; and

a movable detection electrode that extends from the displacement portion, wherein

the fixed detection electrode is disposed to face the movable detection electrode.

11. The gyro sensor according to claim 1, wherein

the shape of the vibrating body is frame-like, and

the fixed detection electrode is disposed inside the vibrating body.

12. An electronic apparatus comprising the gyro sensor according to claim 1.