×

SURFACE SHAPE MEASURING DEVICE

  • US 20130255396A1
  • Filed: 03/28/2013
  • Published: 10/03/2013
  • Est. Priority Date: 03/30/2012
  • Status: Active Grant
First Claim
Patent Images

1. A surface shape measuring device, comprising:

  • a substrate;

    an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate;

    a coating layer on the substrate to cover the electrode pattern; and

    a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×