SURFACE SHAPE MEASURING DEVICE
First Claim
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1. A surface shape measuring device, comprising:
- a substrate;
an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate;
a coating layer on the substrate to cover the electrode pattern; and
a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.
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Abstract
A surface shape measuring device includes a substrate, an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate, a coating layer on the substrate to cover the electrode pattern, and a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.
16 Citations
11 Claims
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1. A surface shape measuring device, comprising:
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a substrate; an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate; a coating layer on the substrate to cover the electrode pattern; and a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification