SYSTEM AND METHOD FOR CLEANING SURFACES AND COMPONENTS OF MASK AND WAFER INSPECTION SYSTEMS BASED ON THE POSITIVE COLUMN OF A GLOW DISCHARGE PLASMA

• US 20130255717A1
• Filed: 03/28/2013
• Published: 10/03/2013
• Est. Priority Date: 04/03/2012
• Status: Abandoned Application

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Delgado, Gildardo, Rose, Garry
• Application Number:
  US13/852,850
• Publication Number:
  US 20130255717A1
• Time in Patent Office: Days
• US Class Current: 134/1.1
• CPC Class Codes: B08B 7/0021 by liquid gases or supercritical fluids
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts

Abstract

A system and method to clean surfaces and components of mask and wafer inspection systems based on the positive column of a glow discharge plasma are disclosed. The surface may be the surface of an optical component in a vacuum chamber or an interior wall of the vacuum chamber. A cathode and an anode may be used to generate the glow discharge plasma. The negative glow associated with the cathode may be isolated and the positive column associated with the anode may be used to clean the optical component or the interior wall of the vacuum chamber. As such, an in situ cleaning process, where the cleaning is done within the vacuum chamber, may be performed.

Claims

1. An apparatus comprising:

a wafer or mask inspection chamber configured to receive an electrical waveform and to conduct the electrical waveform to conductive surfaces of the wafer or mask inspection chamber;

a source of gas associated with the wafer or mask inspection chamber;

a vacuum system associated with the wafer or mask inspection chamber;

a power system associated with the wafer or mask inspection chamber;

an anode associated with the wafer or mask inspection chamber; and

a cathode associated with the wafer or mask inspection chamber, the anode and cathode are configured such that when a voltage is applied between the anode and the cathode in a presence of the gas at vacuum conditions, a positive column of a glow discharge plasma forms near the anode and the positive column is used to clean the wafer or mask inspection chamber surfaces based on the electrical waveform.

2. The apparatus of claim 1, wherein the wafer or mask inspection chamber is further configured to be used in conjunction with an extreme ultraviolet (EUV) lithography process.

3. The apparatus of claim 1, wherein the wafer or inspection chamber is further configured to be used in conjunction with at least one of an ultra-high vacuum (UHV) process or an electron beam lithography process.

4. The apparatus of claim 1, wherein the power source comprises a direct current (DC) power source.

5. The apparatus of claim 1, wherein the cathode and the anode are inside of the wafer or mask inspection chamber.

6. The apparatus of claim 5, wherein the cathode is behind a barrier inside of the wafer or mask inspection chamber.

7. The apparatus of claim 1, wherein the conductive surfaces of the wafer or mask inspection chamber comprise interior walls and optical components.

8. A method performed in a wafer or mask inspection chamber having a source of gas, a vacuum system, an anode, a cathode, and a power system, the method comprising:

applying a voltage between the anode and the cathode in a presence of the gas at vacuum conditions to create a glow discharge plasma comprising a positive column;

conducting an electrical waveform to surfaces of the wafer or mask inspection chamber; and

cleaning the surfaces of the wafer or mask inspection chamber with the positive column, the cleaning being based on the electrical waveform.

9. The method of claim 8, wherein the wafer or mask inspection chamber is configured to be used in conjunction with an extreme ultraviolet (EUV) lithography process.

10. The method of claim 8, wherein the wafer or inspection chamber is configured to be used in conjunction with an ultra-high vacuum (UHV) process.

11. The method of claim 8, wherein the wafer or inspection chamber is configured to be used in conjunction with an electron beam lithography process.

12. The method of claim 8, wherein the surfaces of the wafer or mask inspection chamber comprise interior walls of the wafer or mask inspection chamber.

13. The method of claim 8, wherein the surfaces of the wafer or mask inspection chamber comprise optical components.

14. The method of claim 8, wherein the voltage applied between the anode and the cathode is a direct current (DC) voltage.

15. A system comprising:

a wafer or mask inspection chamber configured to conduct an electrical signal;

a source of gas associated with the wafer or mask inspection chamber;

a vacuum system associated with the wafer or mask inspection chamber;

a power system associated with the wafer or mask inspection chamber;

a first flange coupled to the wafer or mask inspection chamber and comprising an anode; and

a second flange coupled to the wafer or mask inspection chamber and comprising a cathode, the anode and cathode are configured such that when a voltage is applied across the anode and the cathode in a presence of the gas at vacuum conditions, a positive column of a plasma discharge associated with the anode cleans surfaces of the wafer or mask inspection chamber based on the electrical signal.

16. The system of claim 15, wherein the wafer or mask inspection chamber is further configured to be used in conjunction with an extreme ultraviolet (EUV) lithography process.

17. The system of claim 15, wherein a size of the second flange is based on containing a negative glow associated with the cathode.

18. The system of claim 15, wherein the surfaces of the wafer or mask inspection chamber comprise interior walls and optical components.

19. The system of claim 18, wherein the optical components are at least partly based on ruthenium.

20. The system of claim 15, wherein the electrical signal is to be adjusted based on a type of the contaminant to be removed.