SYSTEM AND METHOD FOR CLEANING SURFACES AND COMPONENTS OF MASK AND WAFER INSPECTION SYSTEMS BASED ON THE POSITIVE COLUMN OF A GLOW DISCHARGE PLASMA
First Claim
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1. An apparatus comprising:
- a wafer or mask inspection chamber configured to receive an electrical waveform and to conduct the electrical waveform to conductive surfaces of the wafer or mask inspection chamber;
a source of gas associated with the wafer or mask inspection chamber;
a vacuum system associated with the wafer or mask inspection chamber;
a power system associated with the wafer or mask inspection chamber;
an anode associated with the wafer or mask inspection chamber; and
a cathode associated with the wafer or mask inspection chamber, the anode and cathode are configured such that when a voltage is applied between the anode and the cathode in a presence of the gas at vacuum conditions, a positive column of a glow discharge plasma forms near the anode and the positive column is used to clean the wafer or mask inspection chamber surfaces based on the electrical waveform.
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Abstract
A system and method to clean surfaces and components of mask and wafer inspection systems based on the positive column of a glow discharge plasma are disclosed. The surface may be the surface of an optical component in a vacuum chamber or an interior wall of the vacuum chamber. A cathode and an anode may be used to generate the glow discharge plasma. The negative glow associated with the cathode may be isolated and the positive column associated with the anode may be used to clean the optical component or the interior wall of the vacuum chamber. As such, an in situ cleaning process, where the cleaning is done within the vacuum chamber, may be performed.
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Citations
20 Claims
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1. An apparatus comprising:
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a wafer or mask inspection chamber configured to receive an electrical waveform and to conduct the electrical waveform to conductive surfaces of the wafer or mask inspection chamber; a source of gas associated with the wafer or mask inspection chamber; a vacuum system associated with the wafer or mask inspection chamber; a power system associated with the wafer or mask inspection chamber; an anode associated with the wafer or mask inspection chamber; and a cathode associated with the wafer or mask inspection chamber, the anode and cathode are configured such that when a voltage is applied between the anode and the cathode in a presence of the gas at vacuum conditions, a positive column of a glow discharge plasma forms near the anode and the positive column is used to clean the wafer or mask inspection chamber surfaces based on the electrical waveform. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method performed in a wafer or mask inspection chamber having a source of gas, a vacuum system, an anode, a cathode, and a power system, the method comprising:
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applying a voltage between the anode and the cathode in a presence of the gas at vacuum conditions to create a glow discharge plasma comprising a positive column; conducting an electrical waveform to surfaces of the wafer or mask inspection chamber; and cleaning the surfaces of the wafer or mask inspection chamber with the positive column, the cleaning being based on the electrical waveform. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A system comprising:
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a wafer or mask inspection chamber configured to conduct an electrical signal; a source of gas associated with the wafer or mask inspection chamber; a vacuum system associated with the wafer or mask inspection chamber; a power system associated with the wafer or mask inspection chamber; a first flange coupled to the wafer or mask inspection chamber and comprising an anode; and a second flange coupled to the wafer or mask inspection chamber and comprising a cathode, the anode and cathode are configured such that when a voltage is applied across the anode and the cathode in a presence of the gas at vacuum conditions, a positive column of a plasma discharge associated with the anode cleans surfaces of the wafer or mask inspection chamber based on the electrical signal. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification