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METHOD OF MANUFACTURING OPTICAL WAVEGUIDE DEVICE AND OPTICAL WAVEGUIDE DEVICE

  • US 20130259421A1
  • Filed: 12/11/2012
  • Published: 10/03/2013
  • Est. Priority Date: 03/30/2012
  • Status: Active Grant
First Claim
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1. A method of manufacturing an optical waveguide device, the method comprising:

  • inserting an inclined surface of a mold which is inclined relative to a surface of a substrate including an optical waveguide member into a through hole in which the optical waveguide member is exposed from one surface side of the substrate;

    locating an optical component above an opening of the through hole on the other surface side of the substrate;

    injecting an underfill material into between the optical component and the other surface and into the through hole; and

    curing the underfill material to form a mirror surface.

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