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METHOD FOR MAKING LIGHT EMITTING DIODES

  • US 20130260491A1
  • Filed: 12/27/2012
  • Published: 10/03/2013
  • Est. Priority Date: 03/30/2012
  • Status: Active Grant
First Claim
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1. A method for making a light emitting diode, comprising steps of:

  • providing a substrate having a first surface and a second surface;

    applying a patterned mask layer on the first surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the first surface;

    etching the exposed portion and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc;

    forming a first semiconductor layer, an active layer, and a second semiconductor layer on the second surface;

    electrically contacting a first electrode with the first semiconductor layer; and

    applying a second electrode to cover a second semiconductor layer surface at a distance from the active layer.

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