METHOD FOR MAKING LIGHT EMITTING DIODES
First Claim
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1. A method for making a light emitting diode, comprising steps of:
- providing a substrate having a first surface and a second surface;
applying a patterned mask layer on the first surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the first surface;
etching the exposed portion and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc;
forming a first semiconductor layer, an active layer, and a second semiconductor layer on the second surface;
electrically contacting a first electrode with the first semiconductor layer; and
applying a second electrode to cover a second semiconductor layer surface at a distance from the active layer.
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Abstract
A method for making a LED comprises following steps. A substrate having a first surface and a second surface is provided. A patterned mask layer is applied on a first surface. A number of three-dimensional nano-structures are formed on the first surface and the patterned mask layer is removed. A first semiconductor layer, an active layer and a second semiconductor layer are formed on the second surface. A first electrode and a second electrode are formed to electrically connect with the first semiconductor layer and the second semiconductor pre-layer respectively.
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Citations
20 Claims
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1. A method for making a light emitting diode, comprising steps of:
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providing a substrate having a first surface and a second surface; applying a patterned mask layer on the first surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the first surface; etching the exposed portion and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc; forming a first semiconductor layer, an active layer, and a second semiconductor layer on the second surface; electrically contacting a first electrode with the first semiconductor layer; and applying a second electrode to cover a second semiconductor layer surface at a distance from the active layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for making a light emitting diode, comprising steps of:
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providing a substrate having a first surface and a second surface; forming a first semiconductor layer, an active layer and a second semiconductor layer on the second surface; applying a first electrode electrically contacting with the first semiconductor layer; applying a second electrode to cover a second semiconductor layer surface away from the active layer applying a patterned mask layer on the first surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the first surface; and etching the exposed portion along a first direction and a second direction and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the first direction is substantially perpendicular to the first surface, and the second direction is substantially paralleled to the first surface. - View Dependent Claims (18, 19, 20)
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Specification