METHODS FOR MAKING LIGHT EMITTING DIODES AND OPTICAL ELEMENTS
First Claim
1. A method for making a light emitting diode, comprising steps of:
- providing a substrate having a first surface;
forming a first semiconductor layer, an active layer, and a second semiconductor pre-layer on the first surface;
electrically connecting a first electrode with the first semiconductor layer and a second electrode with the second semiconductor pre-layer; and
applying a patterned mask layer on a second semiconductor pre-layer surface away from the active layer, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer; and
etching the exposed portion of the second semiconductor pre-layer surface and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc.
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Accused Products
Abstract
A method for making a LED comprises following steps. A substrate having a surface is provided. A first semiconductor layer, an active layer and a second semiconductor pre-layer is formed on the surface of the substrate. A first electrode and a second electrode are formed to electrically connect with the first semiconductor layer and the second semiconductor pre-layer respectively. A patterned mask layer is applied on a surface of the second semiconductor pre-layer. A number of three-dimensional nano-structures are formed on the second semiconductor pre-layer and the patterned mask layer is removed. A method for making an optical element is also provided.
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Citations
20 Claims
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1. A method for making a light emitting diode, comprising steps of:
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providing a substrate having a first surface; forming a first semiconductor layer, an active layer, and a second semiconductor pre-layer on the first surface; electrically connecting a first electrode with the first semiconductor layer and a second electrode with the second semiconductor pre-layer; and applying a patterned mask layer on a second semiconductor pre-layer surface away from the active layer, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer; and etching the exposed portion of the second semiconductor pre-layer surface and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for making a light emitting diode, comprising steps of:
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providing a substrate having a first surface; forming a first semiconductor layer, an active layer and a second semiconductor pre-layer on the first surface of the substrate; electrically contacting a first electrode with the first semiconductor layer; electrically contacting a second electrode with the second semiconductor pre-layer; and applying a patterned mask layer on a second semiconductor pre-layer surface away from the active layer, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer surface; and etching the exposed portion of the second semiconductor pre-layer surface along a first direction and a second direction to form a plurality of three-dimensional nano-structures and removing the patterned mask layer, wherein the first direction is substantially perpendicular to the second semiconductor pre-layer surface, and the second direction is substantially paralleled to the second semiconductor pre-layer surface. - View Dependent Claims (15, 16)
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17. A method for making an optical element, comprising steps of:
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providing a substrate having a first surface; applying a patterned mask layer on the first surface, wherein the patterned mask layer comprises a plurality of linear walls arranged side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the first surface; and etching the exposed portion of the first surface and removing the patterned mask layer to form a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc. - View Dependent Claims (18, 19, 20)
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Specification