SELF TEST OF MEMS GYROSCOPE WITH ASICS INTEGRATED CAPACITORS
First Claim
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1. An apparatus comprising:
- a micro-electromechanical system (MEMS) gyroscope sensor including a first sensing capacitor and a second sensing capacitor; and
an integrated circuit (IC), including;
a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC; and
a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.
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Abstract
An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC, and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.
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Citations
20 Claims
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1. An apparatus comprising:
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a micro-electromechanical system (MEMS) gyroscope sensor including a first sensing capacitor and a second sensing capacitor; and an integrated circuit (IC), including; a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC; and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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electrically decoupling a first sensing capacitor of an MEMS gyroscope sensor from an IC; applying a first electrical signal to the decoupled first sensing capacitor; and measuring capacitance of a second sensing capacitor of the MEMS sensor during application of the first electrical signal. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification