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PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

  • US 20130264661A1
  • Filed: 04/05/2013
  • Published: 10/10/2013
  • Est. Priority Date: 04/09/2012
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a movable body which can be displaced with a first axis as a rotation axis and has first and second sections with the first axis as a boundary in plan view and in which a first movable electrode section is provided in the first section;

    a beam section which supports the movable body; and

    a first fixed electrode section disposed so as to face the first movable electrode section,wherein the first fixed electrode section is provided at a position overlapping an end of the first section of the movable body in a direction of a second axis, which is perpendicular to the first axis, in plan view, and is provided in a range of 0.0500X≦

    L≦

    0.816X assuming that a width of the first section in the second axis direction is X and a width of a portion of the first fixed electrode section in the second axis direction overlapping the movable body in plan view is L.

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