MEMS DEVICE AUTOMATIC-GAIN CONTROL LOOP FOR MECHANICAL AMPLITUDE DRIVE
First Claim
1. An apparatus comprising:
- a driver configured to oscillate a proof mass of a MEMS gyroscope;
a charge-to-voltage (C2V) converter configured to receive a sense signal from a MEMS gyroscope and to provide oscillation information of the proof mass;
an analog-to-digital converter (ADC) configured to receive the oscillation information of the proof mass and to provide a digital representation of the oscillation information; and
a digital, automatic gain control circuit configured to receive the digital representation of the oscillation information, to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.
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Abstract
This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.
42 Citations
21 Claims
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1. An apparatus comprising:
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a driver configured to oscillate a proof mass of a MEMS gyroscope; a charge-to-voltage (C2V) converter configured to receive a sense signal from a MEMS gyroscope and to provide oscillation information of the proof mass; an analog-to-digital converter (ADC) configured to receive the oscillation information of the proof mass and to provide a digital representation of the oscillation information; and a digital, automatic gain control circuit configured to receive the digital representation of the oscillation information, to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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oscillating a proof mass of a MEMS gyroscope using a driver; receiving oscillation information of the proof mass using a charge-to-voltage converter; providing a digital representation of the oscillation information using an analog to digital converter; providing oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and a digital automatic gain control circuit; and providing a digital drive command signal using the oscillation amplitude error information and the digital automatic gain control circuit. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification